Microelectronics, Sensors, MEMS, & Photonics

Sandia develops and delivers microsystems and their constituent components, including:

  • Semiconductor Device Fabrication (growth and patterning)
  • Packaging and Test (3D integration, failure analysis, hermetic packages, through-silicon vias)
  • Microelectromechanical Systems (MEMS) (actuators, slides, gears, tip/tilt)
  • Microfluidics (lab on a chip, ink jet)
  • Optical Sensors (photovoltaics, thermal imaging, spectroscopy)
  • Microelectronics (FPGA, radiation hardened, embedded, discrete components, vacuum electronics)
  • Chemical sensors (preconcentrator, separation, detection, IMS, micro-GC)
  • Bio (cybernetics, identification, detection)
  • Displacement Sensors (MEMS accelerometers/gyros)
  • Radiation Sensors (neutron, gamma)
  • Light Sources (VCSEL, OPO, LED, UV LED)
  • Photonic Integrated Circuits (optical networks, communication, telecom, switching, Si photonics)
  • Microoptics (displays, optical switch, phased array)
  • Hybrid Microsystems (IC+MEMS/microfluidics/sensors, micro robots, portable power)
  • Photonic Crystals and Metamaterials
  • RF Devices (microresonator filters, SAW, high speed electronics, RFID)
  • Industrial Process Monitoring and Control (quartz crystal monitors, viscosity, liquid level, temperature)
  • Atom/Ion Traps (magnetometry, magnetoencephalography (MEG), quantum computing)

Technology Summaries
Patents/Applications
Software
21 Technology Summaries
Portfolio
Title
Patent
Date
Mat., Chem., & Nanoscience Micro, Sensor, MEMS, & Phototo Reconditioning of Semiconductor Substrates to Remove Photoresist During Semiconductor Device Fabrication08/13/2013
Micro, Sensor, MEMS, & Phototo Chemical Free Water Analysis with Nanoelectrode Arrays01/06/2014
Micro, Sensor, MEMS, & Phototo Latching Micro Optical Switch11/22/2013
Other Micro, Sensor, MEMS, & Phototo The Sandia Wave Reflector
    10/15/2013
    Other Micro, Sensor, MEMS, & Phototo Two-Sensor System for Absolute Age and Temperature History
      10/07/2013
      Energy & Environment Mat., Chem., & Nanoscience Micro, Sensor, MEMS, & Phototo Microsphere Templated Gallium Nitride Growth and Liftoff10/07/2013
      Micro, Sensor, MEMS, & Phototo PC Board Mountable Corrosion Sensors
        10/07/2013
        Bioscience Micro, Sensor, MEMS, & Phototo CleanBurst Rapid Acoustic Lysis for Point-of-Care Diagnostics
          09/26/2013
          Mat., Chem., & Nanoscience Micro, Sensor, MEMS, & Phototo Silver Ink for Conductor Printing
            06/25/2013
            Other Micro, Sensor, MEMS, & Phototo Push Plate for Ball Grid Array Test Sockets
              05/30/2013
              Micro, Sensor, MEMS, & Phototo Low Cost TiO2 Nanoparticles05/20/2013
              Micro, Sensor, MEMS, & Phototo Micromechanisms with Floating Pivot03/29/2013
              Micro, Sensor, MEMS, & Phototo Fluid Level Monitoring Sensor02/06/2013
              Micro, Sensor, MEMS, & Phototo Micro-Pyrolizer for Rapid Bio-Identification02/05/2013
              Micro, Sensor, MEMS, & Phototo Semipermeable Membranes for Micromachined Silicon Surfaces01/31/2013
              Micro, Sensor, MEMS, & Phototo Heterojunction for Multi-Junction Solar Cells01/30/2013
              Micro, Sensor, MEMS, & Phototo Synthesis of Uniform Magnetic Nanoparticles01/29/2013
              Micro, Sensor, MEMS, & Phototo Microfabricated Field Calibration Assembly01/28/2013
              Micro, Sensor, MEMS, & Phototo High Efficiency Multiple-Junction Solar Cells01/23/2013
              Micro, Sensor, MEMS, & Phototo Direct Detector for Terahertz Radiation01/23/2013
              Micro, Sensor, MEMS, & Phototo Dual-Etalon Frequency-Comb Spectrometer
                01/23/2013