Microelectronics, Sensors, MEMS, & Photonics

Sandia develops and delivers microsystems and their constituent components, including:

  • Semiconductor Device Fabrication (growth and patterning)
  • Packaging and Test (3D integration, failure analysis, hermetic packages, through-silicon vias)
  • Microelectromechanical Systems (MEMS) (actuators, slides, gears, tip/tilt)
  • Microfluidics (lab on a chip, ink jet)
  • Optical Sensors (photovoltaics, thermal imaging, spectroscopy)
  • Microelectronics (FPGA, radiation hardened, embedded, discrete components, vacuum electronics)
  • Chemical sensors (preconcentrator, separation, detection, IMS, micro-GC)
  • Bio (cybernetics, identification, detection)
  • Displacement Sensors (MEMS accelerometers/gyros)
  • Radiation Sensors (neutron, gamma)
  • Light Sources (VCSEL, OPO, LED, UV LED)
  • Photonic Integrated Circuits (optical networks, communication, telecom, switching, Si photonics)
  • Microoptics (displays, optical switch, phased array)
  • Hybrid Microsystems (IC+MEMS/microfluidics/sensors, micro robots, portable power)
  • Photonic Crystals and Metamaterials
  • RF Devices (microresonator filters, SAW, high speed electronics, RFID)
  • Industrial Process Monitoring and Control (quartz crystal monitors, viscosity, liquid level, temperature)
  • Atom/Ion Traps (magnetometry, magnetoencephalography (MEG), quantum computing)

Technology Summaries
Patents/Applications
Software
27 Technology Summaries
Portfolio
Title
Patent
Date
Micro, Sensor, MEMS, & Phototo Direct Detector for Terahertz Radiation01/23/2013
Micro, Sensor, MEMS, & Phototo High Efficiency Multiple-Junction Solar Cells01/23/2013
Micro, Sensor, MEMS, & Phototo Microfabricated Field Calibration Assembly01/28/2013
Micro, Sensor, MEMS, & Phototo Heterojunction for Multi-Junction Solar Cells01/30/2013
Micro, Sensor, MEMS, & Phototo Semipermeable Membranes for Micromachined Silicon Surfaces01/31/2013
Micro, Sensor, MEMS, & Phototo Micro-Pyrolizer for Rapid Bio-Identification02/05/2013
Micro, Sensor, MEMS, & Phototo Fluid Level Monitoring Sensor02/06/2013
Mat., Chem., & Nanoscience Micro, Sensor, MEMS, & Phototo Reconditioning of Semiconductor Substrates to Remove Photoresist During Semiconductor Device Fabrication08/13/2013
Micro, Sensor, MEMS, & Phototo PC Board Mountable Corrosion Sensors03/25/2016
Other Micro, Sensor, MEMS, & Phototo Monolithically Integrated Absolute Frequency Comb Laser System06/03/2016
Energy & Environment Mat., Chem., & Nanoscience Micro, Sensor, MEMS, & Phototo Microsphere Templated Gallium Nitride Growth and Liftoff10/31/2016
Updated!
Micro, Sensor, MEMS, & Phototo Dual-Etalon Frequency-Comb Spectrometer10/31/2016
Updated!
Other Micro, Sensor, MEMS, & Phototo Two-Sensor System for Absolute Age and Temperature History10/07/2013
Other Micro, Sensor, MEMS, & Phototo The Sandia Wave Reflector10/27/2016
Updated!
Micro, Sensor, MEMS, & Phototo Synthesis of Uniform Magnetic Nanoparticles01/29/2013
Micro, Sensor, MEMS, & Phototo Micromechanisms with Floating Pivot03/29/2013
Micro, Sensor, MEMS, & Phototo Low Cost TiO2 Nanoparticles05/20/2013
Other Micro, Sensor, MEMS, & Phototo Push Plate for Ball Grid Array Test Sockets
    05/30/2013
    Micro, Sensor, MEMS, & Phototo Latching Micro Optical Switch11/22/2013
    Mat., Chem., & Nanoscience Micro, Sensor, MEMS, & Phototo Atomic Magnetometer06/02/2014
    Micro, Sensor, MEMS, & Phototo Wireless Passive Radiation Sensor05/09/2014
    Micro, Sensor, MEMS, & Phototo Embedded Fiber Optic Sensors (EFOS)
      07/30/2014
      Bioscience Micro, Sensor, MEMS, & Phototo Miniaturized Chemical Detectors for Point-of-Care Diagnosis
        08/03/2016
        Defense Systems & Assessments Other Micro, Sensor, MEMS, & Phototo Self-Shielding Flex-Circuit Drift Tube09/15/2016
        Other Homeland Security Micro, Sensor, MEMS, & Phototo Zero-Power Radio Receiver More10/07/2016
        Bioscience Micro, Sensor, MEMS, & Phototo Microfluidic Devices More11/03/2016
        New!
        Defense Systems & Assessments Other Micro, Sensor, MEMS, & Phototo Silicon-Based Neutron Detector
          11/29/2016
          New!