Microelectromechanical Inertial Sensor

Patent Number: 8,205,497
Issued: 6/26/2012
Official Filing: View the Complete Patent
Application Number: 398,559/12
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.