Optomechanical force sensors, cantilevers, and systems thereof

Patent Number: 10,031,158
Issued: 7/24/2018
Official Filing: View the Complete Patent
Abstract: An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide.
Filed: 12/14/2016
Application Number: 15/378,900
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.