Single crystal micromechanical resonator

Patent Number: 9,641,154
Issued: 5/2/2017
Official Filing: View the Complete Patent
Abstract: A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.
Filed: 11/11/2016
Application Number: 15/349,593
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.