Lateral Acoustic Wave Resonator Comprising a Suspended Membrane of Low Damping Resonator Material

Patent Number: 8,525,619
Issued: 9/3/2013
Official Filing: View the Complete Patent
Application Number: 790,303/12
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.