Active mechanical-environmental-thermal MEMS device for nanoscale characterization

Patent Number: 10,641,733
Issued: 5/5/2020
Official Filing: View the Complete Patent
Abstract: A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.
Filed: 3/19/2018
Application Number: 15/925,118
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.