Power spectrum analysis for defect screening in integrated circuit devices

Patent Number: 9,188,622
Issued: 11/17/2015
Official Filing: View the Complete Patent
Abstract: A device sample is screened for defects using its power spectrum in response to a dynamic stimulus. The device sample receives a time-varying electrical signal. The power spectrum of the device sample is measured at one of the pins of the device sample. A defect in the device sample can be identified based on results of comparing the power spectrum with one or more power spectra of the device that have a known defect status.
Filed: 12/1/2011
Application Number: 13/309,281
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.