METAL STACK TEMPLATES FOR SUPPRESSING SECONDARY GRAINS IN ScAlN

Patent Number: 11,482,660
Issued: 10/25/2022
Official Filing: View the Complete Patent
Application Number: 661,393/16
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.