Tuning method for microresonators and microresonators made thereby
| Patent Number: | 9,203,134 |
| Issued: | 12/1/2015 |
| Official Filing: | View the Complete Patent |
| Abstract: | A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator. |
| Filed: | 2/28/2013 |
| Application Number: | 13/780,285 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |