| Abstract: | An electrostatic microelectromechanical system (MEMS) based fluid ejector comprises a movable piston structure and a stationary faceplate. A fluid chamber is defined between the piston structure and a substrate. The piston structure 110 may be resiliently mounted on the substrate by one or more spring elements. A fluid to be ejected is supplied in the fluid chamber from a fluid reservoir through a fluid refill hole formed in the substrate. The faceplate includes a nozzle hole through which a fluid jet or drop is ejected. In various exemplary embodiments, the piston structure moves towards the faceplate by electrostatic attraction between the piston structure and the faceplate. As a result of the movement of the piston structure, a portion of the fluid between the piston structure and the faceplate is forced out of the nozzle hole, forming a jet or drop of the fluid. |