Microelectronics & MEMS

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The Microelectronics & MEMS technology area contains solutions resulting from Sandia’s mission to develop trusted microsystems technologies for critical national security applications. It includes beyond leading-edge and increasingly powerful macro-system capabilities and functionalities. 

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Patents & Applications (281)
Patent Title Patent Number Grant Date
Apparatus and method to measure semiconductor optical absorption using microwave charge sensing 11,125,700 09/21/2021
Microfabricated ion trap chip with in situ radio-frequency sensing 11,056,332 07/06/2021
Optical devices enabled by vertical dielectric Mie resonators 11,017,186 05/25/2021
Dual frequency transceiver device 10,984,300 04/20/2021
Microfabricated ion trap chip with an integrated microwave antenna 10,984,976 04/20/2021
Focusing transformers/filters in isotropic/anisotropic piezoelectrics 10,979,018 04/13/2021
Method of fabricating photosensitive devices with reduced process-temperature budget 10,910,508 02/02/2021
Heterogeneously integrated electro-optic modulator 10,788,689 09/29/2020
High density optical waveguide using hybrid spiral pattern 10,663,662 05/26/2020
Hybrid semiconductor-piezoacoustic radiofrequency device 10,666,222 05/26/2020
ScAIN etch mask for highly selective etching 10,651,048 05/12/2020
Active mechanical-environmental-thermal MEMS device for nanoscale characterization 10,641,733 05/05/2020
Kinematic chip to chip bonding 10,620,377 04/14/2020
Fabrication of multilayered carbon MEMS devices 10,570,010 02/25/2020
Supply-noise-rejecting current source 10,566,936 02/18/2020
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby 10,553,697 02/04/2020
Thallium bromide (TIBr) semiconductors and devices with extended life apparatus, methods, and system 10,516,068 12/24/2019
Magnetoelastically actuated MEMS device and methods for its manufacture 10,510,945 12/17/2019
Evanescently coupled piezoelectric acoustic devices 10,491,190 11/26/2019
Non-inverting multi-mode oscillator 10,483,912 11/19/2019
Low-power MEMS wakeup system 10,481,672 11/19/2019
Systems and methods for interferometric end point detection for a focused ion beam fabrication tool 10,446,369 10/15/2019
Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors 10,392,243 08/27/2019
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby 10,388,753 08/20/2019
Bus based timed input output module 10,289,573 05/14/2019
Variable bandwidth filter 10,267,896 04/23/2019
Optical microresonator device with thermal isolation 10,247,676 04/02/2019
Communication device and method of making the same 10,235,614 03/19/2019
Via configuration for wafer-to-wafer interconnection 10,224,312 03/05/2019
Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture 10,214,415 02/26/2019
Gm-C filter and multi-phase clock circuit 10,181,840 01/15/2019
Passive radiative cooling of a body 10,173,792 01/08/2019
Trimming method for microresonators and microresonators made thereby 10,148,244 12/04/2018
Defect screening method for electronic circuits and circuit components using power spectrum anaylysis 10,145,894 12/04/2018
Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals 10,141,495 11/27/2018
Vertically integrated optoelectronics package for MEMS devices 10,139,564 11/27/2018
Graphene heat dissipating structure 10,096,536 10/09/2018
Scanning method for screening of electronic devices 10,094,874 10/09/2018
System on chip module configured for event-driven architecture 10,089,160 10/02/2018
Supply-noise-rejecting current source 10,090,826 10/02/2018
Method and apparatus of enhanced thermoelectric cooling and power conversion 10,072,879 09/11/2018
Systems and methods to maintain optimum stoichiometry for reactively sputtered films 10,074,522 09/11/2018
Optomechanical force sensors, cantilevers, and systems thereof 10,031,158 07/24/2018
Guided wave opto-acoustic device 10,025,123 07/17/2018
Methods for suppressing spurious modes in microresonators 10,009,002 06/26/2018
Flexible packaging for microelectronic devices 9,978,895 05/22/2018
Packaging system with cleaning channel and method of making the same 9,972,553 05/15/2018
Attenuation of spurious responses in electromechanical filters 9,941,857 04/10/2018
Superlattice photodetector having improved carrier mobility 9,929,293 03/27/2018
Diode and method of making the same 9,917,149 03/13/2018
Transceivers and receivers for quantum key distribution and methods pertaining thereto 9,906,311 02/27/2018
Gallium beam lithography for superconductive structure formation 9,882,113 01/30/2018
Method and system for gas flow mitigation of molecular contamination of optics 9,874,512 01/23/2018
Second harmonic generation in resonant optical structures 9,865,987 01/09/2018
Ion-barrier for memristors/ReRAM and methods thereof 9,831,427 11/28/2017
Electroabsorption optical modulator 9,823,497 11/21/2017
Method of making thermally-isolated silicon-based integrated circuits 9,824,932 11/21/2017
Processing device with self-scrubbing logic 9,792,184 10/17/2017
System on chip module configured for event-driven architecture 9,792,250 10/17/2017
Integrated unaligned resonant modulator tuning 9,780,870 10/03/2017
Apparatus for assembly of microelectronic devices 9,763,370 09/12/2017
Adiabatic/diabatic polarization beam splitter 9,759,862 09/12/2017
Avalanche diode having reduced dark current and method for its manufacture 9,748,429 08/29/2017
Fast process flow, on-wafer interconnection and singulation for MEPV 9,748,415 08/29/2017
Integrated optical transceiver with electronically controlled optical beamsteering 9,740,079 08/22/2017
Graphene heat dissipating structure 9,721,867 08/01/2017
On-chip photonic-phononic emitter-receiver apparatus 9,696,492 07/04/2017
Fast frequency divider circuit using combinational logic 9,667,231 05/30/2017
Method of making a silicon nanowire device 9,660,026 05/23/2017
Wafer scale oblique angle plasma etching 9,659,797 05/23/2017
Thermally-isolated silicon-based integrated circuits and related methods 9,646,874 05/09/2017
Single crystal micromechanical resonator 9,641,154 05/02/2017
Device-packaging method and apparatus for optoelectronic circuits 9,632,261 04/25/2017
Reconfigurable optical-to-optical frequency conversion method and apparatus 9,625,785 04/18/2017
Method to fabricate micro and nano diamond devices 9,620,596 04/11/2017
Resonant optical device with a microheater 9,612,458 04/04/2017
Visible light laser voltage probing on thinned substrates 9,599,667 03/21/2017
Plasmon-assisted optical vias for photonic ASICS 9,599,781 03/21/2017
Tuneable photonic device including an array of metamaterial resonators 9,594,266 03/14/2017
Fast process flow, on-wafer interconnection and singulation for MEPV 9,559,219 01/31/2017
Photoelectrochemically driven self-assembly method 9,548,411 01/17/2017
Methods of depositing an alpha-silicon-carbide-containing film at low temperature 9,546,420 01/17/2017
Silicon nanowire device and method for its manufacture 9,536,947 01/03/2017
Single crystal micromechanical resonator and fabrication methods thereof 9,525,398 12/20/2016
Transparent contacts for stacked compound photovoltaic cells 9,508,881 11/29/2016
High-speed optical phase-shifting apparatus 9,488,854 11/08/2016
Methods for dry etching semiconductor devices 9,484,216 11/01/2016
Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof 9,477,040 10/25/2016
Power meter ratio method of stabilizing a resonant modulator 9,467,233 10/11/2016
Silicon force sensor and method of using the same 9,459,161 10/04/2016
Zero-power receiver 9,460,321 10/04/2016
Fabrication method for small-scale structures with non-planar features 9,448,336 09/20/2016
Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems 9,447,895 09/20/2016
Integrated field emission array for ion desorption 9,425,019 08/23/2016
Multilevel resistive information storage and retrieval 9,412,446 08/09/2016
Methods and apparatus for use with extreme ultraviolet light having contamination protection 9,389,180 07/12/2016
Two-dimensional APDs and SPADs and related methods 9,391,225 07/12/2016
Silicon force sensor 9,383,270 07/05/2016
Thermo-optically tuned photonic resonators with concurrent electrical connection and thermal isolation 9,366,822 06/14/2016
Microresonator electrode design 9,337,800 05/10/2016
Methods for resistive switching of memristors 9,336,870 05/10/2016
Method and apparatus of highly linear optical modulation 9,329,413 05/03/2016
Integrated circuit test-port architecture and method and apparatus of test-port generation 9,311,444 04/12/2016
Processing device with self-scrubbing logic 9,274,895 03/01/2016
Programmable electroacoustic filter apparatus and method for its manufacture 9,276,557 03/01/2016
Guided wave opto-acoustic device 9,268,092 02/23/2016
Apparatuses and methods for tuning center frequencies 9,270,281 02/23/2016
Methods and apparatus of entangled photon generation using four-wave mixing 9,268,195 02/23/2016
Methods of producing strain in a semiconductor waveguide and related devices 9,261,647 02/16/2016
Particle control near reticle and optics using showerhead 9,244,368 01/26/2016
Athermalization of resonant optical devices via thermo-mechanical feedback 9,239,431 01/19/2016
Thermally tuneable optical modulator adapted for differential signaling 9,235,065 01/12/2016
Tuning method for microresonators and microresonators made thereby 9,203,134 12/01/2015
Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same 9,202,657 12/01/2015
Three-dimensional stacked structured ASIC devices and methods of fabrication thereof 9,190,392 11/17/2015
Fabrication of small-scale structures with non-planar features 9,190,736 11/17/2015
Power spectrum analysis for defect screening in integrated circuit devices 9,188,622 11/17/2015
Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation 9,156,068 10/13/2015
Low-voltage differentially-signaled modulators 9,128,308 09/08/2015
Systems and methods for controlling an operating wavelength 9,127,983 09/08/2015
Method and apparatus of wide-angle optical beamsteering from a nanoantenna phased array 9,104,086 08/11/2015
Methods and devices for maintaining a resonant wavelength of a photonic microresonator 9,081,135 07/14/2015
Methods and devices for optimizing the operation of a semiconductor optical modulator 9,083,460 07/14/2015
Silicon photonic heater-modulator 9,081,215 07/14/2015
Passive thermo-optic feedback for robust athermal photonic systems 9,063,354 06/23/2015
Electro-refractive photonic device 9,052,535 06/09/2015
Separating semiconductor devices from substrate by etching graded composition release layer disposed between semiconductor devices and substrate including forming protuberances that reduce stiction 9,029,239 05/12/2015
Protecting integrated circuits from excessive charge accumulation during plasma cleaning of multichip modules 9,013,046 04/21/2015
Membrane projection lithography 8,981,337 03/17/2015
High-speed photonic modulator designs 8,947,764 02/03/2015
Processes for multi-layer devices utilizing layer transfer 8,946,052 02/03/2015
Method of forming through substrate vias (TSVs) and singulating and releasing die having the TSVs from a mechanical support substrate 8,906,803 12/09/2014
Structured wafer for device processing 8,895,364 11/25/2014
Memristor using a transition metal nitride insulator 8,872,246 10/28/2014
Method and apparatus for optical phase error correction 8,822,959 09/02/2014
Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode 8,814,622 08/26/2014
Micromachined force-balance feedback accelerometer with optical displacement detection 8,783,106 07/22/2014
Plasmon absorption modulator systems and methods 8,780,431 07/15/2014
Infrared nanoantenna apparatus and method for the manufacture thereof 8,750,653 06/10/2014
Full tape thickness feature conductors for EMI structures 8,747,591 06/10/2014
Optically transduced MEMS gyro device 8,726,730 05/20/2014
Parallel optical sampler 8,730,562 05/20/2014
Structured wafer for device processing 8,729,673 05/20/2014
Optical domain analog to digital conversion methods and apparatus 8,725,004 05/13/2014
Microscale autonomous sensor and communications module 8,680,810 03/25/2014
Ovenized microelectromechanical system (MEMS) resonator 8,669,823 03/11/2014
Ultralow loss cavities and waveguides scattering loss cancellation 8,625,939 01/07/2014
Die singulation method 8,623,744 01/07/2014
System for active control of integrated resonant optical device wavelength 8,615,173 12/24/2013
Silicon photonics thermal phase shifter with reduced temperature range 8,610,994 12/17/2013
Micro electro mechanical system optical switching 8,611,706 12/17/2013
MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads 8,597,985 12/03/2013
Nano-optomechanical transducer 8,600,200 12/03/2013
Optical XOR gate 8,582,931 11/12/2013
Wafer-level packaging with compression-controlled seal ring bonding 8,575,748 11/05/2013
Integrated field emission array for ion desorption 8,536,564 09/17/2013
Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators 8,497,747 07/30/2013
Method to determine the position-dependant metal correction factor for dose-rate equivalent laser testing of semiconductor devices 8,481,345 07/09/2013
Die singulation method 8,461,023 06/11/2013
Latching micro optical switch 8,447,148 05/21/2013
Microfabricated particle focusing device 8,425,749 04/23/2013
Method for fabricating a microelectromechanical resonator 8,367,305 02/05/2013
Optical set-reset latch 8,363,990 01/29/2013
Antifuse with a single silicon-rich silicon nitride insulating layer 8,357,994 01/22/2013
Lithographically defined microporous carbon structures 8,349,547 01/08/2013
Die singulation method and package formed thereby 8,236,611 08/07/2012
Microelectromechanical (MEM) thermal actuator 8,232,858 07/31/2012
Integrated optic vector-matrix multiplier 8,027,587 09/27/2011
Optical NOR gate 8,014,639 09/06/2011
Tunable surface plasmon devices 8,009,356 08/30/2011
Optical NAND gate 7,995,877 08/09/2011
Micromachined cutting blade formed from {211}-oriented silicon 7,992,309 08/09/2011
Microelectromechanical pump utilizing porous silicon 7,980,828 07/19/2011
Wavelength-tunable optical ring resonators 7,983,517 07/19/2011
Optical waveguide device with an adiabatically-varying width 7,941,014 05/10/2011
Microfabricated ion frequency standard 7,859,350 12/28/2010
Microfabricated bulk wave acoustic bandgap device 7,836,566 11/23/2010
Dual-range linearized transimpedance amplifier system 7,825,735 11/02/2010
Fabrication of thermal microphotonic sensors and sensor arrays 7,820,970 10/26/2010
Optical data latch 7,787,719 08/31/2010
Microfabricated bulk wave acoustic bandgap device 7,733,198 06/08/2010
Method for forming precision clockplate with pivot pins 7,728,248 06/01/2010
Nanoeletromechanical switch and logic circuits formed therefrom 7,719,318 05/18/2010
Microelectromechanical tunable inductor 7,710,232 05/04/2010
Modular manifold for integrated fluidics and electronics 7,685,864 03/30/2010
Thermal microphotonic sensor and sensor array 7,667,200 02/23/2010
Microelectromechanical resonator and method for fabrication 7,652,547 01/26/2010
Eddy-current-damped microelectromechanical switch 7,633,362 12/15/2009
Wavelength-tunable optical ring resonators 7,616,850 11/10/2009
Microelectromechanical resonator and method for fabrication 7,616,077 11/10/2009
Apparatus and method for electroforming high aspect ratio micro-parts 7,608,174 10/27/2009
Vitreous carbon mask substrate for X-ray lithography 7,608,367 10/27/2009
Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films 7,597,819 10/06/2009
Microelectromechanical flow control apparatus 7,540,469 06/02/2009
Inertial sensing microelectromechanical (MEM) safe-arm device 7,530,312 05/12/2009
Adhesive particle shielding 7,473,301 01/06/2009
Method for providing a compliant cantilevered micromold 7,465,419 12/16/2008
Method and apparatus for creating a topography at a surface 7,449,699 11/11/2008
Methods for the precise locating and forming of arrays of curved features into a workpiece 7,434,299 10/14/2008
Micro electro-mechanical system (MEMS) pressure sensor for footwear 7,426,873 09/23/2008
Apparatus for raising or tilting a micromechanical structure 7,421,924 09/09/2008
Differential transimpedance amplifier circuit for correlated differential amplification 7,403,065 07/22/2008
Microfabricated diffusion source 7,399,449 07/15/2008
Pyroelectric demodulating detector 7,397,301 07/08/2008
Microelectromechanical safing and arming apparatus 7,383,774 06/10/2008
Contour mode resonators with acoustic reflectors 7,385,334 06/10/2008
Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices 7,375,332 05/20/2008
Geophysics-based method of locating a stationary earth object 7,376,507 05/20/2008
Optical displacement sensor 7,355,720 04/08/2008
Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom 7,339,454 03/04/2008
Heterogeneously integrated microsystem-on-a-chip 7,335,972 02/26/2008
Integration of a waveguide self-electrooptic effect device and a vertically coupled interconnect waveguide 7,336,855 02/26/2008
Micromachined electrode array 7,308,317 12/11/2007
Radiation-hardened transistor and integrated circuit 7,298,010 11/20/2007
Eddy-current-damped microelectromechanical switch 7,289,009 10/30/2007
MEMS fluidic actuator 7,246,524 07/24/2007
Method for forming permanent magnets with different polarities for use in microelectromechanical devices 7,207,102 04/24/2007
Triple inverter pierce oscillator circuit suitable for CMOS 7,183,868 02/27/2007
Apparatus comprising a tunable nanomechanical near-field grating and method for controlling far-field emission 7,173,764 02/06/2007
Silicon micro-mold 7,124,994 10/24/2006
Method to control artifacts of microstructural fabrication 7,105,098 09/12/2006
Compliant cantilevered micromold 7,090,189 08/15/2006
Condenser optic with sacrificial reflective surface 7,081,992 07/25/2006
Inertial measurement unit using rotatable MEMS sensors 7,066,004 06/27/2006
Microelectromechanical safing and arming apparatus 7,051,656 05/30/2006
Anti-stiction coating for microelectromechanical devices 7,045,170 05/16/2006
Gray scale x-ray mask 7,008,737 03/07/2006
Self-seeding ring optical parametric oscillator 6,980,354 12/27/2005
Flip-chip light emitting diode with resonant optical microcavity 6,969,874 11/29/2005
Three-dimensional microelectromechanical tilting platform operated by gear-driven racks 6,960,849 11/01/2005
Sacrificial plastic mold with electroplatable base 6,929,733 08/16/2005
Erected mirror optical switch 6,903,861 06/07/2005
Tailored ink for piston driven electrostatic liquid drop modulator 6,881,250 04/19/2005
Method for the fabrication of three-dimensional microstructures by deep X-ray lithography 6,875,544 04/05/2005
Microoptical system and fabrication method therefor 6,867,435 03/15/2005
Photoimageable composition 6,858,378 02/22/2005
Method and apparatus for detecting the presence and thickness of carbon and oxide layers on EUV reflective surfaces 6,847,463 01/25/2005
Polymeric mold for providing a micro-scale part 6,841,306 01/11/2005
Silicon micro-mold and method for fabrication 6,841,339 01/11/2005
Microelectronic device package with an integral window mounted in a recessed lip 6,809,413 10/26/2004
X-ray mask and method for making 6,810,104 10/26/2004
Apparatus and method for controlling plating uniformity 6,802,950 10/12/2004
X-ray mask and method for providing same 6,798,862 09/28/2004
Image-rotating, 4-mirror, ring optical parametric oscillator 6,775,054 08/10/2004
Apparatus for in situ cleaning of carbon contaminated surfaces 6,772,776 08/10/2004
NPN double heterostructure bipolar transistor with InGaAsN base region 6,765,242 07/20/2004
Microelectromechanical apparatus for elevating and tilting a platform 6,759,787 07/06/2004
Method for providing an arbitrary three-dimensional microstructure in silicon using an anisotropic deep etch 6,749,997 06/15/2004
In-vacuum exposure shutter 6,744,493 06/01/2004
Reconditioning of semiconductor substrates to remove photoresist during semiconductor device fabrication 6,682,607 01/27/2004
Castable plastic mold with electroplatable base 6,679,471 01/20/2004
Method for applying a photoresist layer to a substrate having a preexisting topology 6,680,263 01/20/2004
Planar-constructed spatial micro-stage 6,675,671 01/13/2004
Bi-level microelectronic device package with an integral window 6,674,159 01/06/2004
Broadband visible light source based on AllnGaN light emitting diodes 6,665,329 12/16/2003
Single level microelectronic device package with an integral window 6,661,084 12/09/2003
Optical parametric osicllators with improved beam quality 6,647,033 11/11/2003
Photoimageable composition 6,645,696 11/11/2003
Mask-to-wafer alignment system 6,642,995 11/04/2003
Monitoring system including an electronic sensor platform and an interrogation transceiver 6,624,760 09/23/2003
Cantilever epitaxial process 6,599,362 07/29/2003
Multiple wavelength photolithography for preparing multilayer microstructures 6,582,890 06/24/2003
Damascene fabrication of nonplanar microcoils 6,578,254 06/17/2003
Radiation source with shaped emission 6,563,907 05/13/2003
Microelectromechanical apparatus for elevating and tilting a platform 6,545,385 04/08/2003
Monolithic integration of a MOSFET with a MEMS device 6,531,331 03/11/2003
Gold-based electrical interconnections for microelectronic devices 6,500,760 12/31/2002
Electrode configuration for extreme-UV electrical discharge source 6,498,832 12/24/2002
Removable pellicle for lithographic mask protection and handling 6492067 12/10/2002
X-ray mask and method for providing same 6,477,225 11/05/2002
Surface micromachined structure fabrication methods for a fluid ejection device 6472332 10/29/2002
Multi-axis planar slide system 6,463,664 10/15/2002
Electronic drive systems and methods 6419335 07/16/2002
Micromachined fluid ejector systems and methods having improved response characteristics 6416169 07/09/2002
Fluid ejection systems and methods with secondary dielectric fluid 6406130 06/18/2002
Fluid ejection systems and methods with secondary dielectric fluid 6,406,130 06/18/2002
Micromachined fluid ejector systems and methods 6367915 04/09/2002
Method for fabricating an ultra-low expansion mask blank having a crystalline silicon layer 6368942 04/09/2002
Magnetic drive systems and methods for a micromachined fluid ejector 6350015 02/26/2002
Surface acoustic wave resonators with integrated internal coupler reflectors 4,237,433 12/02/1980
Patent Application (TEST) Pending Pending
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