Silicon nanowire device and method for its manufacture
| Patent Number: | 9,536,947 |
| Issued: | 1/3/2017 |
| Official Filing: | View the Complete Patent |
| Abstract: | There is provided an electronic device and a method for its manufacture. The device comprises an elongate silicon nanowire less than 0.5 .mu.m in cross-sectional dimensions and having a hexagonal cross-sectional shape due to annealing-induced energy relaxation. |
| Filed: | 8/14/2013 |
| Application Number: | 13/966,553 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |