Inertial Sensors
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Patents & Applications (4)
| Title | Patent Number | Grant Date |
|---|---|---|
| High sensitivity single-axis MEMS accelerometer with bilateral flexures | 10,473,687 | 11/12/2019 |
| Optomechanical gyroscope utilizing the Sagnac effect | 10,458,795 | 10/29/2019 |
| Integrated resonant micro-optical gyroscope and method of fabrication | 7,106,448 | 09/12/2006 |
| Inertial measurement unit using rotatable MEMS sensors | 7,066,004 | 06/27/2006 |