Ovenized microelectromechanical system (MEMS) resonator

Patent Number: 8,669,823
Issued: 3/11/2014
Official Filing: View the Complete Patent
Abstract: An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.
Filed: 4/9/2012
Application Number: 13/442,689
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.