Method for the Protection of Extreme Ultraviolet Lithography Optics

Patent Number: 7,740,916
Issued: 6/22/2010
Official Filing: View the Complete Patent
Application Number: 818,586/10
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.