Method for the Protection of Extreme Ultraviolet Lithography Optics
| Patent Number: | 7,740,916 |
| Issued: | 6/22/2010 |
| Official Filing: | View the Complete Patent |
| Application Number: | 818,586/10 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |