Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

Patent Number: 10,392,243
Issued: 8/27/2019
Official Filing: View the Complete Patent
Abstract: A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.
Filed: 10/1/2015
Application Number: 15/516,322
Related Opportunity: Full Stack Neuromorphic
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.