| Abstract: | An electrostatic actuator is provide that can include a fluidic line, a
first electrode, and a second electrode such that a gate chamber portion
of the fluidic line is sandwiched between the first electrode and the
second electrode. The electrostatic actuator can also include a
pressure-balancing channel in fluid communication with the gate chamber
portion where the first electrode is sandwiched between the
pressure-balancing channel and the gate chamber portion. A pneumatic
valve system is provided which includes an electrostatic gate and a
fluidic channel fluidly separate from a fluidic control line. A pneumatic
valve portion of the fluidic control line can be positioned relative to a
portion of the fluidic channel such that expansion of the pneumatic valve
portion restricts fluid flow through the fluidic channel. Methods of
using an electrostatic actuator and a pneumatic valve system are also
provided. |