Trimming method for microresonators and microresonators made thereby

Patent Number: 10,148,244
Issued: 12/4/2018
Official Filing: View the Complete Patent
Abstract: A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material deposited on a facial surface of the element. In one instance, the resonance of the element can be adjusting by using a feedback loop to control annealing of the deposited film.
Filed: 9/14/2016
Application Number: 15/265,340
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.