Trimming method for microresonators and microresonators made thereby
| Patent Number: | 10,148,244 |
| Issued: | 12/4/2018 |
| Official Filing: | View the Complete Patent |
| Abstract: | A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material deposited on a facial surface of the element. In one instance, the resonance of the element can be adjusting by using a feedback loop to control annealing of the deposited film. |
| Filed: | 9/14/2016 |
| Application Number: | 15/265,340 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |