Hybrid Microsystems

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Patents & Applications (36)
Title Patent Number Grant Date
Microfabricated ion trap chip with in situ radio-frequency sensing 11,056,332 07/06/2021
Microfabricated ion trap chip with an integrated microwave antenna 10,984,976 04/20/2021
Method of fabricating photosensitive devices with reduced process-temperature budget 10,910,508 02/02/2021
Active mechanical-environmental-thermal MEMS device for nanoscale characterization 10,641,733 05/05/2020
Fabrication of multilayered carbon MEMS devices 10,570,010 02/25/2020
Supply-noise-rejecting current source 10,566,936 02/18/2020
Non-inverting multi-mode oscillator 10,483,912 11/19/2019
Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors 10,392,243 08/27/2019
Variable bandwidth filter 10,267,896 04/23/2019
Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture 10,214,415 02/26/2019
Gm-C filter and multi-phase clock circuit 10,181,840 01/15/2019
Supply-noise-rejecting current source 10,090,826 10/02/2018
Optomechanical force sensors, cantilevers, and systems thereof 10,031,158 07/24/2018
Adiabatic/diabatic polarization beam splitter 9,759,862 09/12/2017
Integrated optical transceiver with electronically controlled optical beamsteering 9,740,079 08/22/2017
Silicon force sensor and method of using the same 9,459,161 10/04/2016
Method and apparatus of wide-angle optical beamsteering from a nanoantenna phased array 9,104,086 08/11/2015
Plasmon absorption modulator systems and methods 8,780,431 07/15/2014
Infrared nanoantenna apparatus and method for the manufacture thereof 8,750,653 06/10/2014
Optically transduced MEMS gyro device 8,726,730 05/20/2014
Microscale autonomous sensor and communications module 8,680,810 03/25/2014
Microfabricated ion frequency standard 7,859,350 12/28/2010
Microfabricated bulk wave acoustic bandgap device 7,836,566 11/23/2010
Dual-range linearized transimpedance amplifier system 7,825,735 11/02/2010
Modular manifold for integrated fluidics and electronics 7,685,864 03/30/2010
Microelectromechanical flow control apparatus 7,540,469 06/02/2009
Inertial sensing microelectromechanical (MEM) safe-arm device 7,530,312 05/12/2009
Methods for the precise locating and forming of arrays of curved features into a workpiece 7,434,299 10/14/2008
Micro electro-mechanical system (MEMS) pressure sensor for footwear 7,426,873 09/23/2008
Microfabricated diffusion source 7,399,449 07/15/2008
Optical displacement sensor 7,355,720 04/08/2008
Heterogeneously integrated microsystem-on-a-chip 7,335,972 02/26/2008
MEMS fluidic actuator 7,246,524 07/24/2007
Triple inverter pierce oscillator circuit suitable for CMOS 7,183,868 02/27/2007
Inertial measurement unit using rotatable MEMS sensors 7,066,004 06/27/2006
Erected mirror optical switch 6,903,861 06/07/2005
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