Microelectronics & MEMS

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The Microelectronics & MEMS technology area contains solutions resulting from Sandia’s mission to develop trusted microsystems technologies for critical national security applications. It includes beyond leading-edge and increasingly powerful macro-system capabilities and functionalities. 

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Ultra-Wide Bandgap Power Electronics
Ultra-Wide Bandgap Power Electronics

Ultra-wide bandgap power electronics to miniaturize and vastly improve the...

High Performance Dual-Mode Oscillator Circuits
High Performance Dual-Mode Oscillator Circuits

Dual-mode oscillator architectures for use with SC cut resonators Sandia...

Plasma Micronozzle Adapter
Plasma Micronozzle Adapter

A micronozzle adapter capable of printing line widths and thicknesses...

Patent Title Patent Number Grant Date
Plasma-based method for delayering of circuits US12532680B2 01/20/2026
Area selective deposition templated by hydrogen and halogen resists US12518967B1 01/06/2026
Single clock delay step in multi-stage switched-capacitor delays US12489434B1 12/02/2025
Large programmable delay at high frequency through aliasing US12476624B1 11/18/2025
Electrochemical random access memory device with contact layer as a heat source US12446479B1 10/14/2025
Complementary current reuse even harmonic frequency multiplier US12438506B1 10/07/2025
Integrated photonics with active polarization control US12429716B1 09/30/2025
Low power mixed gas sensor US12422421B2 09/23/2025
Ultraviolet and visible light integrated acousto-optic modulators US12416824B1 09/16/2025
Continuously variable optical confinement for optical amplifiers US12355209B1 07/08/2025
Meissner-effect transition-edge-sensor microcalorimeter US12352634B1 07/08/2025
Transistor with curvilinear gate configuration for improved thermal distribution US12310082B1 05/20/2025
Method for modifying or verifying a circuit by inserting a saboteur circuit US12210427B1 01/28/2025
Acoustoelectric optomechanical devices US12204183B1 01/21/2025
Interlocking proof mass for mems inertial sensing device US12129167B1 10/29/2024
Miniature ultra-low-power LNA employing current reuse and bias sharing US12095424B1 09/17/2024
Self-insulating metal vias in magnetic micro-devices US12094629B1 09/17/2024
Heterogeneous radiation-hardened computing system US12079159B1 09/03/2024
Multichannel transistor with improved gate conformation US12068216B1 08/20/2024
CMOS compatible low-resistivity Al—Sc metal etch stop US12034050B1 07/09/2024
Systems and methods for resolving a number of incident RF-range photons US12029141B1 07/02/2024
Heterogeneously integrated acoustoelectric amplifiers US11948979B1 04/02/2024
Thermally sensitive state change ionic redox transistor US11942282B1 03/26/2024
Monolithic integration of optical waveguides with metal routing layers US11906351B1 02/20/2024
High aspect ratio gratings fabricated by electrodeposition US11798844B1 10/24/2023
Method of chemical doping that uses CMOS-compatible processes US11798808B1 10/24/2023
Concentrated thermal tuner for optical microdisk devices US11796841B1 10/24/2023
Multi-chip photonics transceiver US11726276B1 08/15/2023
MEMS-tunable optical ring resonator US11722120B1 08/08/2023
Heterogeneous integration of an electro-optical platform US11675126B1 06/13/2023
Integrated silicon optical amplifier with reduced residual pump US11652330B1 05/16/2023
Low power sensor for NOx detection US11573217B2 02/07/2023
Piezoelectric deformable photonic devices US11569431B1 01/31/2023
Miniaturized vacuum package and methods of making same US11551921B1 01/10/2023
Enhanced microfabrication using electrochemical techniques US11549903B1 01/10/2023
Compact laser source with frequency modulators generating multiple lines US11545815B1 01/03/2023
Analog vector-matrix multiplication by capacitive elements with resistive state storage US11494464B1 11/08/2022
Metal stack templates for suppressing secondary grains in sca1n US11482660B1 10/25/2022
Thermally sensitive ionic redox transistor US11450802B1 09/20/2022
Photolithography of atomic layer resist US11424135B1 08/23/2022
Phase-wrapping method for beam steering in optical phased arrays US11409183B1 08/09/2022
Hybrid piezoelectric microresonator US11387802B1 07/12/2022
Tunneling full-wave infrared rectenna US11296240B1 04/05/2022
Active shunt capacitance cancelling oscillator for resonators US11171604B1 11/09/2021
Optical coupler for heterogeneous integration US11163115B1 11/02/2021
Trapped ion platform with optical input and output US11150609B1 10/19/2021
Apparatus and method to measure semiconductor optical absorption using microwave charge sensing US11125700B2 09/21/2021
Microfabricated ion trap chip with in situ radio-frequency sensing US11056332B1 07/06/2021
Optical devices enabled by vertical dielectric Mie resonators US11017186B2 05/25/2021
Microfabricated ion trap chip with an integrated microwave antenna US10984976B1 04/20/2021
Dual frequency transceiver device US10984300B2 04/20/2021
Focusing transformers/filters in isotropic/anisotropic piezoelectrics US10979018B1 04/13/2021
Method of fabricating photosensitive devices with reduced process-temperature budget US10910508B1 02/02/2021
Heterogeneously integrated electro-optic modulator US10788689B1 09/29/2020
Hybrid semiconductor-piezoacoustic radiofrequency device US10666222B1 05/26/2020
ScAIN etch mask for highly selective etching US10651048B1 05/12/2020
Active mechanical-environmental-thermal MEMS device for nanoscale characterization US10641733B2 05/05/2020
Fabrication of multilayered carbon MEMS devices US10570010B1 02/25/2020
Supply-noise-rejecting current source US10566936B1 02/18/2020
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10553697B1 02/04/2020
Thallium bromide (TIBr) semiconductors and devices with extended life apparatus, methods, and system US10516068B1 12/24/2019
Evanescently coupled piezoelectric acoustic devices US10491190B1 11/26/2019
Non-inverting multi-mode oscillator US10483912B1 11/19/2019
Low-power MEMS wakeup system US10481672B1 11/19/2019
Systems and methods for interferometric end point detection for a focused ion beam fabrication tool US10446369B1 10/15/2019
Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors US10392243B2 08/27/2019
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10388753B1 08/20/2019
Bus based timed input output module US10289573B1 05/14/2019
Variable bandwidth filter US10267896B1 04/23/2019
Communication device and method of making the same US10235614B1 03/19/2019
Via configuration for wafer-to-wafer interconnection US10224312B1 03/05/2019
Method for simultaneous modification of multiple semiconductor device features US10217704B1 02/26/2019
Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture US10214415B1 02/26/2019
Gm-C filter and multi-phase clock circuit US10181840B1 01/15/2019
Passive radiative cooling of a body US10173792B1 01/08/2019
Trimming method for microresonators and microresonators made thereby US10148244B1 12/04/2018
Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals US10141495B1 11/27/2018
Vertically integrated optoelectronics package for MEMS devices US10139564B1 11/27/2018
Graphene heat dissipating structure US10096536B1 10/09/2018
Supply-noise-rejecting current source US10090826B1 10/02/2018
System on chip module configured for event-driven architecture US10089160B2 10/02/2018
Systems and methods to maintain optimum stoichiometry for reactively sputtered films US10074522B1 09/11/2018
Method and apparatus of enhanced thermoelectric cooling and power conversion US10072879B1 09/11/2018
Optomechanical force sensors, cantilevers, and systems thereof US10031158B1 07/24/2018
Methods for suppressing spurious modes in microresonators US10009002B1 06/26/2018
Flexible packaging for microelectronic devices US9978895B2 05/22/2018
Packaging system with cleaning channel and method of making the same US9972553B1 05/15/2018
Attenuation of spurious responses in electromechanical filters US9941857B1 04/10/2018
Superlattice photodetector having improved carrier mobility US9929293B1 03/27/2018
Diode and method of making the same US9917149B1 03/13/2018
Gallium beam lithography for superconductive structure formation US9882113B1 01/30/2018
Second harmonic generation in resonant optical structures US9865987B1 01/09/2018
Ion-barrier for memristors/ReRAM and methods thereof US9831427B1 11/28/2017
Method of making thermally-isolated silicon-based integrated circuits US9824932B1 11/21/2017
Electroabsorption optical modulator US9823497B1 11/21/2017
System on chip module configured for event-driven architecture US9792250B1 10/17/2017
Processing device with self-scrubbing logic US9792184B2 10/17/2017
Apparatus for assembly of microelectronic devices US9763370B2 09/12/2017
Graphene heat dissipating structure US9721867B1 08/01/2017
Fast frequency divider circuit using combinational logic US9667231B1 05/30/2017
Method of making a silicon nanowire device US9660026B1 05/23/2017
Wafer scale oblique angle plasma etching US9659797B1 05/23/2017
Thermally-isolated silicon-based integrated circuits and related methods US9646874B1 05/09/2017
Single crystal micromechanical resonator US9641154B2 05/02/2017
Plasmon-assisted optical vias for photonic ASICS US9599781B1 03/21/2017
Visible light laser voltage probing on thinned substrates US9599667B1 03/21/2017
Photoelectrochemically driven self-assembly method US9548411B2 01/17/2017
Methods of depositing an alpha-silicon-carbide-containing film at low temperature US9546420B1 01/17/2017
Silicon nanowire device and method for its manufacture US9536947B1 01/03/2017
Single crystal micromechanical resonator and fabrication methods thereof US9525398B1 12/20/2016
Transparent contacts for stacked compound photovoltaic cells US9508881B2 11/29/2016
Methods for dry etching semiconductor devices US9484216B1 11/01/2016
Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof US9477040B1 10/25/2016
Zero-power receiver US9460321B1 10/04/2016
Silicon force sensor and method of using the same US9459161B1 10/04/2016
Fabrication method for small-scale structures with non-planar features US9448336B1 09/20/2016
Integrated field emission array for ion desorption US9425019B1 08/23/2016
Multilevel resistive information storage and retrieval US9412446B1 08/09/2016
Silicon force sensor US9383270B1 07/05/2016
Microresonator electrode design US9337800B1 05/10/2016
Methods for resistive switching of memristors US9336870B1 05/10/2016
Integrated circuit test-port architecture and method and apparatus of test-port generation US9311444B1 04/12/2016
Programmable electroacoustic filter apparatus and method for its manufacture US9276557B1 03/01/2016
Processing device with self-scrubbing logic US9274895B1 03/01/2016
Apparatuses and methods for tuning center frequencies US9270281B1 02/23/2016
Tuning method for microresonators and microresonators made thereby US9203134B1 12/01/2015
Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same US9202657B1 12/01/2015
Fabrication of small-scale structures with non-planar features US9190736B1 11/17/2015
Three-dimensional stacked structured ASIC devices and methods of fabrication thereof US9190392B1 11/17/2015
Separating semiconductor devices from substrate by etching graded composition release layer disposed between semiconductor devices and substrate including forming protuberances that reduce stiction US9029239B2 05/12/2015
Protecting integrated circuits from excessive charge accumulation during plasma cleaning of multichip modules US9013046B1 04/21/2015
Membrane projection lithography US8981337B1 03/17/2015
Processes for multi-layer devices utilizing layer transfer US8946052B2 02/03/2015
Method of forming through substrate vias (TSVs) and singulating and releasing die having the TSVs from a mechanical support substrate US8906803B2 12/09/2014
Frequency selective infrared sensors US8897609B1 11/25/2014
Structured wafer for device processing US8895364B1 11/25/2014
Memristor using a transition metal nitride insulator US8872246B1 10/28/2014
Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode US8814622B1 08/26/2014
Micromachined force-balance feedback accelerometer with optical displacement detection US8783106B1 07/22/2014
Plasmon absorption modulator systems and methods US8780431B1 07/15/2014
Infrared nanoantenna apparatus and method for the manufacture thereof US8750653B1 06/10/2014
Full tape thickness feature conductors for EMI structures US8747591B1 06/10/2014
Parallel optical sampler US8730562B1 05/20/2014
Structured wafer for device processing US8729673B1 05/20/2014
Optically transduced MEMS gyro device US8726730B1 05/20/2014
Optical domain analog to digital conversion methods and apparatus US8725004B1 05/13/2014
Microscale autonomous sensor and communications module US8680810B1 03/25/2014
Ovenized microelectromechanical system (MEMS) resonator US8669823B1 03/11/2014
Die singulation method US8623744B1 01/07/2014
Micro electro mechanical system optical switching US8611706B1 12/17/2013
MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads US8597985B1 12/03/2013
Optical XOR gate US8582931B1 11/12/2013
Wafer-level packaging with compression-controlled seal ring bonding US8575748B1 11/05/2013
Integrated field emission array for ion desorption US8536564B1 09/17/2013
Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material US8525619B1 09/03/2013
Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators US8497747B1 07/30/2013
Die singulation method US8461023B1 06/11/2013
Frequency selective infrared sensors US8452134B1 05/28/2013
Microfabricated particle focusing device US8425749B1 04/23/2013
Optical set-reset latch US8363990B1 01/29/2013
Die singulation method and package formed thereby US8236611B1 08/07/2012
Microelectromechanical (MEM) thermal actuator US8232858B1 07/31/2012
Microelectromechanical inertial sensor US8205497B1 06/26/2012
Optical NOR gate US8014639B1 09/06/2011
Tunable surface plasmon devices US8009356B1 08/30/2011
Optical NAND gate US7995877B1 08/09/2011
Microelectromechanical pump utilizing porous silicon US7980828B1 07/19/2011
Microfabricated ion frequency standard US7859350B1 12/28/2010
Microfabricated bulk wave acoustic bandgap device US7836566B1 11/23/2010
Dual-range linearized transimpedance amplifier system US7825735B1 11/02/2010
Fabrication of thermal microphotonic sensors and sensor arrays US7820970B1 10/26/2010
Optical data latch US7787719B1 08/31/2010
Microfabricated bulk wave acoustic bandgap device US7733198B1 06/08/2010
Method for forming precision clockplate with pivot pins US7728248B1 06/01/2010
Nanoeletromechanical switch and logic circuits formed therefrom US7719318B1 05/18/2010
Microelectromechanical tunable inductor US7710232B1 05/04/2010
Eddy-current-damped microelectromechanical switch US7633362B1 12/15/2009
Microelectromechanical resonator and method for fabrication US7616077B1 11/10/2009
Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films US7597819B1 10/06/2009
Microelectromechanical flow control apparatus US7540469B1 06/02/2009
Inertial sensing microelectromechanical (MEM) safe-arm device US7530312B1 05/12/2009
Method and apparatus for creating a topography at a surface US7449699B1 11/11/2008
Methods for the precise locating and forming of arrays of curved features into a workpiece US7434299B1 10/14/2008
Micro electro-mechanical system (MEMS) pressure sensor for footwear US7426873B1 09/23/2008
Apparatus for raising or tilting a micromechanical structure US7421924B1 09/09/2008
Differential transimpedance amplifier circuit for correlated differential amplification US7403065B1 07/22/2008
Pyroelectric demodulating detector US7397301B1 07/08/2008
Contour mode resonators with acoustic reflectors US7385334B1 06/10/2008
Geophysics-based method of locating a stationary earth object US7376507B1 05/20/2008
Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices US7375332B1 05/20/2008
Optical displacement sensor US7355720B1 04/08/2008
Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom US7339454B1 03/04/2008
Integration of a waveguide self-electrooptic effect device and a vertically coupled interconnect waveguide US7336855B1 02/26/2008
Radiation-hardened transistor and integrated circuit US7298010B1 11/20/2007