Fabrication, Packaging, Testing, and Validation

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Title Patent Number Grant Date
Method for modifying or verifying a circuit by inserting a saboteur circuit US12210427B1 01/28/2025
Self-insulating metal vias in magnetic micro-devices US12094629B1 09/17/2024
Heterogeneous radiation-hardened computing system US12079159B1 09/03/2024
CMOS compatible low-resistivity Al—Sc metal etch stop US12034050B1 07/09/2024
High aspect ratio gratings fabricated by electrodeposition US11798844B1 10/24/2023
Method of chemical doping that uses CMOS-compatible processes US11798808B1 10/24/2023
Miniaturized vacuum package and methods of making same US11551921B1 01/10/2023
Enhanced microfabrication using electrochemical techniques US11549903B1 01/10/2023
Metal stack templates for suppressing secondary grains in sca1n US11482660B1 10/25/2022
Photolithography of atomic layer resist US11424135B1 08/23/2022
Tunneling full-wave infrared rectenna US11296240B1 04/05/2022
Apparatus and method to measure semiconductor optical absorption using microwave charge sensing US11125700B2 09/21/2021
ScAIN etch mask for highly selective etching US10651048B1 05/12/2020
ScAIN etch mask for highly selective etching US10651048B1 05/12/2020
ScAIN etch mask for highly selective etching US10651048B1 05/12/2020
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10553697B1 02/04/2020
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10553697B1 02/04/2020
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10553697B1 02/04/2020
Systems and methods for interferometric end point detection for a focused ion beam fabrication tool US10446369B1 10/15/2019
Systems and methods for interferometric end point detection for a focused ion beam fabrication tool US10446369B1 10/15/2019
Systems and methods for interferometric end point detection for a focused ion beam fabrication tool US10446369B1 10/15/2019
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10388753B1 08/20/2019
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10388753B1 08/20/2019
Bus based timed input output module US10289573B1 05/14/2019
Bus based timed input output module US10289573B1 05/14/2019
Via configuration for wafer-to-wafer interconnection US10224312B1 03/05/2019
Via configuration for wafer-to-wafer interconnection US10224312B1 03/05/2019
Passive radiative cooling of a body US10173792B1 01/08/2019
Passive radiative cooling of a body US10173792B1 01/08/2019
Graphene heat dissipating structure US10096536B1 10/09/2018
Graphene heat dissipating structure US10096536B1 10/09/2018
System on chip module configured for event-driven architecture US10089160B2 10/02/2018
System on chip module configured for event-driven architecture US10089160B2 10/02/2018
Method and apparatus of enhanced thermoelectric cooling and power conversion US10072879B1 09/11/2018
Method and apparatus of enhanced thermoelectric cooling and power conversion US10072879B1 09/11/2018
Flexible packaging for microelectronic devices US9978895B2 05/22/2018
Flexible packaging for microelectronic devices US9978895B2 05/22/2018
Packaging system with cleaning channel and method of making the same US9972553B1 05/15/2018
Packaging system with cleaning channel and method of making the same US9972553B1 05/15/2018
Gallium beam lithography for superconductive structure formation US9882113B1 01/30/2018
Gallium beam lithography for superconductive structure formation US9882113B1 01/30/2018
Method of making thermally-isolated silicon-based integrated circuits US9824932B1 11/21/2017
System on chip module configured for event-driven architecture US9792250B1 10/17/2017
Processing device with self-scrubbing logic US9792184B2 10/17/2017
Apparatus for assembly of microelectronic devices US9763370B2 09/12/2017
Graphene heat dissipating structure US9721867B1 08/01/2017
Method of making a silicon nanowire device US9660026B1 05/23/2017
Wafer scale oblique angle plasma etching US9659797B1 05/23/2017
Thermally-isolated silicon-based integrated circuits and related methods US9646874B1 05/09/2017
Visible light laser voltage probing on thinned substrates US9599667B1 03/21/2017
Photoelectrochemically driven self-assembly method US9548411B2 01/17/2017
Methods of depositing an alpha-silicon-carbide-containing film at low temperature US9546420B1 01/17/2017
Silicon nanowire device and method for its manufacture US9536947B1 01/03/2017
Transparent contacts for stacked compound photovoltaic cells US9508881B2 11/29/2016
Methods for dry etching semiconductor devices US9484216B1 11/01/2016
Fabrication method for small-scale structures with non-planar features US9448336B1 09/20/2016
Integrated circuit test-port architecture and method and apparatus of test-port generation US9311444B1 04/12/2016
Processing device with self-scrubbing logic US9274895B1 03/01/2016
Tuning method for microresonators and microresonators made thereby US9203134B1 12/01/2015
Fabrication of small-scale structures with non-planar features US9190736B1 11/17/2015
Three-dimensional stacked structured ASIC devices and methods of fabrication thereof US9190392B1 11/17/2015
Separating semiconductor devices from substrate by etching graded composition release layer disposed between semiconductor devices and substrate including forming protuberances that reduce stiction US9029239B2 05/12/2015
Protecting integrated circuits from excessive charge accumulation during plasma cleaning of multichip modules US9013046B1 04/21/2015
Membrane projection lithography US8981337B1 03/17/2015
Processes for multi-layer devices utilizing layer transfer US8946052B2 02/03/2015
Method of forming through substrate vias (TSVs) and singulating and releasing die having the TSVs from a mechanical support substrate US8906803B2 12/09/2014
Structured wafer for device processing US8895364B1 11/25/2014
Full tape thickness feature conductors for EMI structures US8747591B1 06/10/2014
Structured wafer for device processing US8729673B1 05/20/2014
Die singulation method US8623744B1 01/07/2014
Method for forming precision clockplate with pivot pins US7728248B1 06/01/2010
Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films US7597819B1 10/06/2009
Apparatus for raising or tilting a micromechanical structure US7421924B1 09/09/2008
Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices US7375332B1 05/20/2008