Patent • #6,545,385. A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators...
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Microelectromechanical apparatus for elevating and tilting a platform
Patent • #6,759,787. A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators...
Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators
Patent • #8,497,747. A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types...
Microelectromechanical flow control apparatus
Patent • #7,540,469. A microelectromechanical (MEM) flow control apparatus is disclosed which includes a fluid channel formed on a substrate from a first layer of a nonconducting material (e.g. silicon nitride). A first electrode is provided on the first layer of the nonconducting material outside the flow channel; and a second electrode...
Microelectromechanical Inertial Sensor
Patent • #8,205,497.
Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation
Patent • #6,967,757. A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of...
Microelectromechanical pump utilizing porous silicon
Patent • #7,980,828. A microelectromechanical (MEM) pump is disclosed which includes a porous silicon region sandwiched between an inlet chamber and an outlet chamber. The porous silicon region is formed in a silicon substrate and contains a number of pores extending between the inlet and outlet chambers, with each pore having a...
Microelectromechanical resonator and method for fabrication
Patent • #7,616,077. A method is disclosed for the robust fabrication of a microelectromechanical (MEM) resonator. In this method, a pattern of holes is formed in the resonator mass with the position, size and number of holes in the pattern being optimized to minimize an uncertainty .DELTA.f in the resonant frequency f.sub.0...
Microelectromechanical resonator and method for fabrication
Patent • #7,652,547. A method is disclosed for the robust fabrication of a microelectromechanical (MEM) resonator. In this method, a pattern of holes is formed in the resonator mass with the position, size and number of holes in the pattern being optimized to minimize an uncertainty .DELTA.f in the resonant frequency f.sub.0...
Microelectromechanical safe arm device
Patent • #8,191,477. Microelectromechanical (MEM) apparatus and methods for operating, for preventing unintentional detonation of energetic components comprising pyrotechnic and explosive materials, such as air bag deployment systems, munitions and pyrotechnics. The MEM apparatus comprises an interrupting member that can be moved to block (interrupt) or complete (uninterrupt) an explosive train that...
Microelectromechanical safing and arming apparatus
Patent • #7,383,774. A two-stage acceleration sensing apparatus is disclosed which has applications for use in a fuze assembly for a projected munition. The apparatus, which can be formed by bulk micromachining or LIGA, can sense acceleration components along two orthogonal directions to enable movement of a shuttle from an "as-fabricated" position...
Microelectromechanical safing and arming apparatus
Patent • #7,051,656. A two-stage acceleration sensing apparatus is disclosed which has applications for use in a fuze assembly for a projected munition. The apparatus, which can be formed by bulk micromachining or LIGA, can sense acceleration components along two orthogonal directions to enable movement of a shuttle from an "as-fabricated" position...
Microelectromechanical tunable inductor
Patent • #7,710,232. A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor...
Microelectronic device package with an integral window mounted in a recessed lip
Patent • #6,809,413. A microelectronic package with an integral window mounted in a recessed lip for housing a microelectronic device. The device can be a semiconductor chip, a CCD chip, a CMOS chip, a VCSEL chip, a laser diode, a MEMS device, or a IMEMS device. The package can be formed of...
Microelectronics & MEMS
Technology Area • The Microelectronics & MEMS technology area contains solutions resulting from Sandia’s mission to develop trusted microsystems technologies for critical national security applications. It includes beyond leading-edge and increasingly powerful macro-system capabilities and functionalities. This technology area also contains specialized portfolios related to: Compound Semiconductor DevicesPhotonic Integrated Circuits & Silicon PhotonicsFabrication,...
Microelectroporation device for genomic screening
Patent • #8,828,736. We have developed an microelectroporation device that combines microarrays of oligonucleotides, microfluidic channels, and electroporation for cell transfection and high-throughput screening applications (e.g. RNA interference screens). Microarrays allow the deposition of thousands of different oligonucleotides in microscopic spots. Microfluidic channels and microwells enable efficient loading of cells into the...
Microfabricated Bragg waveguide
Patent • #6,807,353. A microfabricated Bragg waveguide of semiconductor-compatible material having a hollow core and a multilayer dielectric cladding can be fabricated by integrated circuit technologies. The microfabricated Bragg waveguide can comprise a hollow channel waveguide or a hollow fiber. The Bragg fiber can be fabricated by coating a sacrificial mandrel or...
Microfabricated bulk wave acoustic bandgap device
Patent • #7,733,198. A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the...
Microfabricated bulk wave acoustic bandgap device
Patent • #7,836,566. A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the...
Microfabricated cylindrical ion trap
Patent • #6,870,158. A microscale cylindrical ion trap, having an inner radius of order one micron, can be fabricated using surface micromachining techniques and materials known to the integrated circuits manufacturing and microelectromechanical systems industries. Micromachining methods enable batch fabrication, reduced manufacturing costs, dimensional and positional precision, and monolithic integration of massive...
Microfabricated diffusion source
Patent • #7,399,449. A microfabricated diffusion source to provide for a controlled diffusion rate of a vapor comprises a porous reservoir formed in a substrate that can be filled with a liquid, a headspace cavity for evaporation of the vapor therein, a diffusion channel to provide a controlled diffusion of the vapor,...
Microfabricated Field Calibration Assembly
Featured Opportunity • Reliable determination of the presence and/or quantity of a particular analyte in the field can be greatly enhanced if the analytical instrument is equipped with a time-of-use calibration standard. While proper calibration is necessary for reliability and accuracy, it can be challenging and cumbersome to provide such calibration in the...
Microfabricated field calibration assembly for analytical instruments
Patent • #7,913,534. A microfabricated field calibration assembly for use in calibrating analytical instruments and sensor systems. The assembly comprises a circuit board comprising one or more resistively heatable microbridge elements, an interface device that enables addressable heating of the microbridge elements, and, in some embodiments, a means for positioning the circuit...
Microfabricated fuel heating value monitoring device
Patent • #7,708,943. A microfabricated fuel heating value monitoring device comprises a microfabricated gas chromatography column in combination with a catalytic microcalorimeter. The microcalorimeter can comprise a reference thermal conductivity sensor to provide diagnostics and surety. Using microfabrication techniques, the device can be manufactured in production quantities at a low per-unit cost....
Microfabricated ion frequency standard
Patent • #7,859,350. A microfabricated ion frequency standard (i.e. an ion clock) is disclosed with a permanently-sealed vacuum package containing a source of ytterbium (Yb) ions and an octupole ion trap. The source of Yb ions is a micro-hotplate which generates Yb atoms which are then ionized by a ultraviolet light-emitting diode...
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