Inertial Sensors

Patents & Applications (6)

Title	Patent Number	Grant Date
High sensitivity single-axis MEMS accelerometer with bilateral flexures	10,473,687	11/12/2019
Optomechanical gyroscope utilizing the Sagnac effect	10,458,795	10/29/2019
High data-rate atom interferometers through high recapture efficiency	8,941,053	01/27/2015
Microelectromechanical Inertial Sensor	8,205,497	06/26/2012
Integrated resonant micro-optical gyroscope and method of fabrication	7,106,448	09/12/2006
Inertial measurement unit using rotatable MEMS sensors	7,066,004	06/27/2006

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