Particle control near reticle and optics using showerhead
| DWPI Title: Particle control arrangement structure for extreme UV (EUV) illumination inspection system, has EUV illumination port that is defined by thermal shroud, and holder that is allowed to move area of reticle over inspection hole |
| Abstract: A method and an apparatus to protect a reticle against particles and chemicals in an actinic EUV reticle inspection tool are presented. The method and apparatus utilizes a pair of porous metal diffusers in the form of showerheads to provide a continual flow of clean gas. The main showerhead bathes the reticle surface to be inspected in smoothly flowing, low pressure gas, isolating it from particles coming from surrounding volumes. The secondary showerhead faces away from the reticle and toward the EUV illumination and projection optics, supplying them with purge gas while at the same time creating a buffer zone that is kept free of any particle contamination originating from those optics. |
| Use: Particle control arrangement structure for EUV illumination inspection system. |
| Advantage: The EUV illumination port is defined by thermal shroud, and holder is allowed to move area of reticle over inspection hole. Thus, the reticle against particles and chemicals in actinic EUV reticle inspection tool can be protected. |
| Novelty: The structure has a movable holder provided with a holder area. A gas source is allowed to deliver flow of gas in a channel (28) defined by lower surface and first surface. A post optics box is attached to shroud and is allowed to extend away from channel and second surface. Extreme UV (EUV) illumination port is defined by thermal shroud. A holder (27) is allowed to move the area of reticle over inspection hole. |
| Filed: 9/23/2013 |
| Application Number: US14033929A |
| Tech ID: SD 12478.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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