| Abstract: MEMS magnetometers with optically transduced resonator displacement are
described herein. Improved sensitivity, crosstalk reduction, and extended
dynamic range may be achieved with devices including a deflectable
resonator suspended from the support, a first grating extending from the
support and disposed over the resonator, a pair of drive electrodes to
drive an alternating current through the resonator, and a second grating
in the resonator overlapping the first grating to form a multi-layer
grating having apertures that vary dimensionally in response to
deflection occurring as the resonator mechanically resonates in a plane
parallel to the first grating in the presence of a magnetic field as a
function of the Lorentz force resulting from the alternating current. A
plurality of such multi-layer gratings may be disposed across a length of
the resonator to provide greater dynamic range and/or accommodate
fabrication tolerances. |
| Filed: 12/14/2011 |
| Application Number: 13/326139 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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