| Abstract: The present application relates to vertically integrated assemblies
including a MEMS-based optomechanical architecture. In some embodiments,
the assembly includes a MEMS/optoelectronic module, an emitter module,
and a detector module, where these modules are vertically integrated.
Methods of fabricating such assemblies are also described herein. |
| Filed: 1/28/2016 |
| Application Number: 15/9153 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
| Attribution for Derwent World Patents Index Records published on Sandia ® Clarivate. All rights reserved. Republication or redistribution of Clarivate content, including by framing or similar means, is prohibited without the prior written consent of Clarivate. Clarivate and its logo, as well as all other trademarks used herein are trademarks of their respective owners and used under license. |