Vertically integrated optoelectronics package for MEMS devices
| DWPI Title: Vertically integrated optoelectronics package assembly for micro-electromechanical system (MEMS) devices, has emitter modules with vertically emitting light sources, and detector modules with vertically integrated photodetectors |
| Abstract: The present application relates to vertically integrated assemblies including a MEMS-based optomechanical architecture. In some embodiments, the assembly includes a MEMS/optoelectronic module, an emitter module, and a detector module, where these modules are vertically integrated. Methods of fabricating such assemblies are also described herein. |
| Use: Vertically integrated optoelectronics package assembly for MEMS devices. |
| Advantage: Provides a vertically integrated optoelectronics package assembly that can accommodate and transmit optical signals to and from various modules. Allows optical signals to be effectively transmitted between the modules. |
| Novelty: The package assembly (100) includes a MEMS-optoelectronic module (120), emitter modules (110), and detector modules (130). The MEMS-optoelectronic module includes a photonic circuit. Each emitter module has vertically emitting light sources directly and optically connected to the photonic circuit, and configured to provide optical input signals to the photonic circuit. Each detector module has vertically integrated photodetectors directly and optically connected to the photonic circuit, and configured to receive optical output signals from the photonic circuit and to transmit electrical output signals. Each of the emitter modules and detector modules is displaced in a direction normal to the plane of the photonic circuit. The optical axis of each of the vertically emitting light sources and vertically integrated photodetectors is parallel to the normal to the plane of the photonic circuit. |
| Filed: 1/28/2016 |
| Application Number: US15009153A |
| Tech ID: SD 13215.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
| Data from Derwent World Patents Index, provided by Clarivate All rights reserved. Republication or redistribution of Clarivate content, including by framing or similar means, is prohibited without the prior written consent of Clarivate. Clarivate and its logo, as well as all other trademarks used herein are trademarks of their respective owners and used under license. |