Trimming method for microresonators and microresonators made thereby
| Abstract: A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material deposited on a facial surface of the element. In one instance, the resonance of the element can be adjusting by using a feedback loop to control annealing of the deposited film. |
| Filed: 9/14/2016 |
| Application Number: 15/265340 |
| Tech ID: SD 12593.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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