| Abstract: | A fabrication method is capable of creating canonical metamaterial
structures arrayed in a three-dimensional geometry. The method uses a
membrane suspended over a cavity with predefined pattern as a directional
evaporation mask. Metallic and/or dielectric material can be evaporated
at high vacuum through the patterned membrane to deposit resonator
structures on the interior walls of the cavity, thereby providing a unit
cell of micron-scale dimension. The method can produce volumetric
metamaterial structures comprising layers of such unit cells of resonator
structures. |