Three-dimensional metamaterials
| DWPI Title: Fabricating three-dimensional metamaterial that operates at infrared/optical frequency involves forming patterned membrane over cavity in matrix material and depositing resonator structure on cavity through mask opening to reproduce pattern |
| Abstract: A fabrication method is capable of creating canonical metamaterial structures arrayed in a three-dimensional geometry. The method uses a membrane suspended over a cavity with predefined pattern as a directional evaporation mask. Metallic and/or dielectric material can be evaporated at high vacuum through the patterned membrane to deposit resonator structures on the interior walls of the cavity, thereby providing a unit cell of micron-scale dimension. The method can produce volumetric metamaterial structures comprising layers of such unit cells of resonator structures. |
| Use: For fabricating 3D metamaterial (claimed) that operate at infrared and optical frequencies, useful in device applications. |
| Advantage: The method enables the fabrication of metamaterial resonators on curved surfaces. In addition to providing new route to fabrication of micron and sub-micron scale resonators with out-of-plane electrical current components, the method enables the fabrication of resonators with current distributions which are inherently non-coplanar. The fabrication of resonators with rationally designed arbitrary current distributions provides more flexibility and performance in metamaterial designs. The process is scalable to large areas and can be stacked to achieve macroscopic 3D volumes of material. |
| Novelty: Fabricating three-dimensional (3D) metamaterial involves forming patterned membrane over a cavity (22) in a matrix material (21), where the patterned membrane comprises at least one mask opening that images a resonator structure, and directionally depositing at least one resonator structure on an inner wall surface of the cavity through the mask opening (26) in the patterned membrane to reproduce the pattern on the inner wall surface. |
| Filed: 7/30/2009 |
| Application Number: US2009512082A |
| Tech ID: SD 11247.0 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
| Data from Derwent World Patents Index, provided by Clarivate All rights reserved. Republication or redistribution of Clarivate content, including by framing or similar means, is prohibited without the prior written consent of Clarivate. Clarivate and its logo, as well as all other trademarks used herein are trademarks of their respective owners and used under license. |