| Abstract: A fabrication method is capable of creating canonical metamaterial
structures arrayed in a three-dimensional geometry. The method uses a
membrane suspended over a cavity with predefined pattern as a directional
evaporation mask. Metallic and/or dielectric material can be evaporated
at high vacuum through the patterned membrane to deposit resonator
structures on the interior walls of the cavity, thereby providing a unit
cell of micron-scale dimension. The method can produce volumetric
metamaterial structures comprising layers of such unit cells of resonator
structures. |
| Filed: 7/30/2009 |
| Application Number: 12/512082 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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