| Abstract: Various technologies for providing an operator of a focused ion beam
(FIB) system with navigational and processing data are described herein.
An exemplary system includes a broadband light source and a narrowband
light source that emit light to a target of the FIB. An optical detector
receives reflections of the broadband light from the target and outputs
data that is used to generate two-dimensional images of the target in a
region near a location of incidence of the FIB at the target. An
interferometer receives reflections of the narrowband light from the
target and outputs data indicative of an interference pattern of the
narrowband reflections. A computing device computes a thickness of one or
more material layers that make up the target based upon the interference
pattern. A two-dimensional image of the target and an indication of the
computed thickness are then displayed to the operator of the FIB. |
| Filed: 6/14/2017 |
| Application Number: 15/623239 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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