Single crystal micromechanical resonator and fabrication methods thereof
| Patent Number: | 9,525,398 |
| Issued: | 12/20/2016 |
| Official Filing: | View the Complete Patent |
| Abstract: | The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal. |
| Filed: | 5/27/2014 |
| Application Number: | 14/288,236 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |