| Abstract: The present invention relates to a single crystal micromechanical
resonator. In particular, the resonator includes a lithium niobate or
lithium tantalate suspended plate. Also provided are improved
microfabrication methods of making resonators, which does not rely on
complicated wafer bonding, layer fracturing, and mechanical polishing
steps. Rather, the methods allow the resonator and its components to be
formed from a single crystal. |
| Filed: 5/27/2014 |
| Application Number: 14/288236 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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