Single crystal micromechanical resonator
| Patent Number: | 9,641,154 |
| Issued: | 5/2/2017 |
| Official Filing: | View the Complete Patent |
| Abstract: | A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal. |
| Filed: | 11/11/2016 |
| Application Number: | 15/349,593 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |