| Abstract: A single crystal micromechanical resonator includes a suspended plate of
lithium niobate or lithium tantalate. The suspended plate and a support
structure are formed from a single crystal. |
| Filed: 11/11/2016 |
| Application Number: 15/349593 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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