Single crystal micromechanical resonator

DWPI Title: Single crystal micromechanical resonator i.e. miniature acoustic resonator, for band select filter array in e.g. filter, has anchoring regions suspending resonating portion within structure, where trench is placed below and around portion
Abstract: A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.
Use: Single crystal micromechanical resonator i.e. miniature acoustic resonator, for a band select filter array (claimed) in filters and oscillators.
Advantage: The resonator selecting dimension of a resonating portion to optimize coupling coefficient keff, resonant frequency and quality factor. The resonator optimizes to promote symmetric modes, asymmetric modes and shear modes of acoustic wave propagating in a piezoelectric crystal. The resonator provides a potential path for integrating band select filters on a single die, thus reducing size, cost and complexity of next generation wireless handsets.
Novelty: The resonator (100) has a resonating portion comprising a single X-cut or Y-cut crystal of lithium niobate or lithium tantalite. A support structure is placed below the resonating portion, where the resonating portion and the support structure are provided of a single X-cut or Y-cut crystal. A set of anchoring regions suspends a resonating portion within the support structure, where a trench is placed below and around the resonating portion. Electrodes are placed on a surface of the resonating portion.
Filed: 11/11/2016
Application Number: US15349593A
Tech ID: SD 12809.1
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.
Data from Derwent World Patents Index, provided by Clarivate
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