Silicon force sensor and method of using the same
| DWPI Title: Method for measuring high forces and high load shock rates of highly dynamic shock loads by e.g. capacitive sensor, in harsh real-world environments, involves measuring reduction in preload to facilitate determining magnitude of load |
| Abstract: The various technologies presented herein relate to a sensor for measurement of high forces and/or high load shock rate(s), whereby the sensor utilizes silicon as the sensing element. A plate of Si can have a thinned region formed therein on which can be formed a number of traces operating as a Wheatstone bridge. The brittle Si can be incorporated into a layered structure comprising ductile and/or compliant materials. The sensor can have a washer-like configuration which can be incorporated into a nut and bolt configuration, whereby tightening of the nut and bolt can facilitate application of a compressive preload upon the sensor. Upon application of an impact load on the bolt, the compressive load on the sensor can be reduced (e.g., moves towards zero-load), however the magnitude of the preload can be such that the load on the sensor does not translate to tensile stress being applied to the sensor. |
| Use: Method for measuring high forces and high load shock rates of highly dynamic shock loads by a load or pressure sensor e.g. capacitive sensor, piezoelectric sensor, and piezoresistive sensor, in extremely harsh real-world environments. |
| Advantage: The method enables facilitating control of a stress level at a sensor die while maintaining a high signal to noise (S/N) ratio. The method enables utilizing input ground and a voltage output that are connected to minimize noise, which can effectively create a voltage divider circuit. The method enables reducing stress, increasing maximum achievable load, and reducing a signal output. The method enables protecting sensing elements. |
| Novelty: The method involves applying a compressive preload to a piezoresistive device, where the compressive preload is greater in magnitude than an operating range of operational loads. An operational load is transmitted within the operating range to the piezoresistive device to produce a reduction in the compressive preload. The reduction in the compressive preload is measured to facilitate determining magnitude of the operational load, where the compressive preload is applied to the piezoresistive device by tightening of a nut (140) on a bolt shaft (133) of a bolt (130). |
| Filed: 6/1/2016 |
| Application Number: US15170355A |
| Tech ID: SD 12578.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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