Ovenized microelectromechanical system (MEMS) resonator
| Patent Number: | 8,669,823 |
| Issued: | 3/11/2014 |
| Official Filing: | View the Complete Patent |
| Abstract: | An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity. |
| Filed: | 4/9/2012 |
| Application Number: | 13/442,689 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |