| Abstract: A low-power miniaturized photoacoustic sensor uses an optical microphone
made by semiconductor fabrication techniques, and optionally allows for
all-optical communication to and from the sensor. This allows integration
of the photoacoustic sensor into systems with special requirements, such
as those that would be reactive in an electrical discharge condition. The
photoacoustic sensor can also be operated in various other modes with
wide application flexibility. |
| Filed: 10/17/2013 |
| Application Number: 14/56863 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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