Micromachined microwave signal control device and method for making same

DWPI Title: Micro machined coplanar microwave device for controlling transmission of microwave signals, has Quasi-lumped capacitors and Quasi-lumped inductor arranged with in waveguide channel to control signal transmitted in channel
Abstract: A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.
Use: Micro machined coplanar microwave device for controlling transmission of microwave signals in radar and communication systems.
Advantage: The Quasi-lumped elements provides filters with high quality factor and reduced size.
Novelty: A dielectric substrate (100) has waveguide channels (150) with copper vertices (140). A filter with the Quasi-lumped element such as Quasi-lumped capacitors and Quasi-lumped inductor with the meandering line is arranged with in the channel to control the signal transmitted in the channel. A metal plunger is inserted in the waveguide channel to shut of the signal transmission when the plunger is moved from normal position.
Filed: 6/8/2005
Application Number: US2005149400A
Tech ID: SD 8520.0
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.
Data from Derwent World Patents Index, provided by Clarivate
All rights reserved. Republication or redistribution of Clarivate content, including by framing or similar means, is prohibited without the prior written consent of Clarivate. Clarivate and its logo, as well as all other trademarks used herein are trademarks of their respective owners and used under license.