Microfabricated bulk wave acoustic bandgap device
| DWPI Title: Method for fabricating bulk wave acoustic bandgap device, involves causing destructive interference within acoustic bandgap of longitudinal acoustic wave propagating in plane of membrane, by using periodicity of array |
| Abstract: A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 μm or less). |
| Use: Method for fabricating bulk wave acoustic bandgap device. |
| Advantage: Since the destructive interference is caused within acoustic bandgap of longitudinal acoustic wave propagating in plane of membrane, by using periodicity of array, the bulk wave acoustic bandgap device is fabricated with high-impedance, high-density scatters, and low-acoustic impedance matrix membrane. |
| Novelty: The method involves forming a matrix layer (24) having material on release layer (23) over substrate (21) which is made silicon, semiconductor, glass, ceramic, or metal. A two-dimensional periodic array of scatters having higher acoustic impedance than matrix material, is formed within matrix material. The release layer is removed to release a membrane having matrix material and periodic array of scatters. The destructive interference is caused within an acoustic bandgap of a longitudinal acoustic wave propagating in plane of membrane, by using periodicity of array. |
| Filed: 4/21/2010 |
| Application Number: US2010764700A |
| Tech ID: SD 10074.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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