| Abstract: We have demonstrated that a surface acoustic wave (SAW) sensor coated
with a nanoporous framework material (NFM) film can perform
ultrasensitive water vapor detection at concentrations in air from 0.05
to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to
other MEMS-based sensors, such as microcantilevers, or to quartz crystal
microbalance sensors. We identify a specific NFM that provides high
sensitivity and selectivity to water vapor. However, our approach is
generalizable to detection of other species using NFM to provide
sensitivity and selectivity. |
| Filed: 10/5/2011 |
| Application Number: 13/253274 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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