Integrated transmission electron microscope
| DWPI Title: Integrated transmission electron microscope for combining multiple electron emitters and beam pathways to converge onto single electron-transparent sample, has electron sources that are provided with associated condenser lenses |
| Abstract: An integrated transmission electron microscope comprising multiple electron sources for tuned beams of ultrafast, scanning probe, and parallel illumination in varied beam energies can be alternated within sub-microseconds onto a sample with dynamic ‘transient state’ processes to acquire atomic-scale structural/chemical data with site specificity. The various electron sources and condenser optics enable high-resolution imaging, high-temporal resolution imaging, and chemical imaging, using fast-switching magnets to direct the different electron beams onto a single maneuverable objective pole piece where the sample resides. Such multimodal in situ characterization tools housed in a single microscope have the potential to revolutionize materials science. |
| Use: Integrated transmission electron microscope used for combining multiple electron emitters and beam pathways to converge onto a single electron-transparent sample. |
| Advantage: The quantity and strategic placement of a surrounding pole-piece gap ports are improved to increase detection accessibility. |
| Novelty: The microscope comprises a number of electron sources that are provided with associated condenser lenses. An incident beam electrostatic deflector is provided to direct one of the electron beams to illuminate an electron-transparent sample. The the remaining electron beams are deflected to multiple beam dumps. A sample holder is provided to hold and manipulate the sample. An upper objective lens is provided to collimate the illuminating beam on the sample. A lower objective lens is used to image a transmitted beam. A projection system comprises a projection lens and a transmitted beam electrostatic deflector that are used to project and deflect the transmitted beam image. |
| Filed: 9/28/2020 |
| Application Number: US17035267A |
| Tech ID: SD 14534.2 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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