| Abstract: Various technologies described herein pertain to compressive sensing
electron microscopy. A compressive sensing electron microscope includes a
multi-beam generator and a detector. The multi-beam generator emits a
sequence of electron patterns over time. Each of the electron patterns
can include a plurality of electron beams, where the plurality of
electron beams is configured to impart a spatially varying electron
density on a sample. Further, the spatially varying electron density
varies between each of the electron patterns in the sequence. Moreover,
the detector collects signals respectively corresponding to interactions
between the sample and each of the electron patterns in the sequence. |
| Filed: 9/19/2012 |
| Application Number: 13/622943 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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