| Abstract: The fabrication of small-scale structures is disclosed. A unit-cell of a
small-scale structure with non-planar features is fabricated by forming a
membrane on a suitable material. A pattern is formed in the membrane and
a portion of the substrate underneath the membrane is removed to form a
cavity. Resonators are then directionally deposited on the wall or sides
of the cavity. The cavity may be rotated during deposition to form
closed-loop resonators. The resonators may be non-planar. The unit-cells
can be formed in a layer that includes an array of unit-cells. |
| Filed: 12/13/2011 |
| Application Number: 13/324052 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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