Fabrication of small-scale structures with non-planar features
| DWPI Title: Small-scale structure, has one resonator which comprises material that is deposited as closed curve on cavity wall, and one closed-loop resonator is deposited by membrane projection lithography |
| Abstract: The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells. |
| Use: Small-scale structure. |
| Advantage: The membrane and the substrate are formed of different materials and have properties that allow one of the materials to be etched without affecting the other material. The design enables antenna structures to be embedded on-chip to enable intra-chip communication or inter-chip communication that is optical in nature due to the small-scale size of the antenna structure. |
| Novelty: The structure has a substrate (102), a cavity (106) that is formed in the substrate. The cavity has a wall and having a radius in a range between one micrometer and ten micrometers. One closed-loop electromagnetic resonator (108) is formed conformally on a non-planar portion of the cavity wall. The one resonator comprises material which is deposited as a closed curve on the cavity wall. The one closed-loop resonator is deposited by membrane projection lithography. The substrate is rotated during deposition to form the one closed-loop resonator. |
| Filed: 12/13/2011 |
| Application Number: US13324052A |
| Tech ID: SD 11578.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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