ENHANCED MICROFABRICATION USING ELECTROCHEMICAL TECHNIQUES
Patent Number: | 11,549,903 |
Issued: | 1/10/2023 |
Official Filing: | View the Complete Patent |
Application Number: | 244,501/16 |
Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |