Apparatus, method and system for imaging and utilization of SEM charged particles
| DWPI Title: Scanning electron microscope (SEM) system for facilitating multiplexed SEM imaging, has computing system that receives image of detector from imaging system and computes Abel transform based upon image |
| Abstract: A scanning electron microscope (SEM) system includes an SEM objective that emits an electron beam toward a sample, causing emission of charged particles including secondary electrons, Auger electrons, backscattered electrons, anions and cations. The SEM system includes electron optics elements that are configured to establish electric fields around the sample that accelerate charged particles toward a detector. A two-dimensional distribution of locations of incidence of the charged particles on the detector is indicative of energies of the charged particles and their emission angles from the sample. A three-dimensional spatial distribution of charged particles emitted from the sample is recovered by performing an Abel transform over the distribution on the detector. The energies and emission angles of the charged particles are then determined from the three-dimensional spatial distribution. |
| Use: SEM system for imaging and utilization of SEM charged particles. |
| Advantage: The SEM imaging system measures many bands of particle energies and emission angles simultaneously, without requiring reconfiguration of the components of the system. |
| Novelty: The system (100) has a detector (114) which is positioned such that electron focusing element (108,110) accelerates the charged particles toward a surface of the detector. The responsive to a charged particle in the charged particles is incident on the surface of the detector. The detector is configured to emit light indicative of a location at which the charged particle struck the surface of the detector. The location is indicative of energy and an angle of emission of the charged particle. An imaging system (124) is configured to output an image of the detector. A computing system is configured to receive the image of the detector from the imaging system and compute an Abel transform based upon the image. The Abel transform is indicative of the distribution of the charged particles about the beam of primary electrons. The computing system outputs data is indicative of the energy and the angle of emission of the charged particle based upon the Abel transform. |
| Filed: 11/21/2018 |
| Application Number: US16198356A |
| Tech ID: SD 14555.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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