Active mechanical-environmental-thermal MEMS device for nanoscale characterization
| Patent Number: | 10,641,733 |
| Issued: | 5/5/2020 |
| Official Filing: | View the Complete Patent |
| Abstract: | A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique. |
| Filed: | 3/19/2018 |
| Application Number: | 15/925,118 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |