Active mechanical-environmental-thermal MEMS device for nanoscale characterization
| Abstract: A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique. |
| Filed: 3/19/2018 |
| Application Number: 15/925118 |
| Tech ID: SD 14127.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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