Microstructured silicon radiation detector

United States Patent

9,595,628
March 14, 2017
View the Complete Patent at the US Patent & Trademark Office
Silicon-Based Neutron Detector
A radiation detector comprises a silicon body in which are defined vertical pores filled with a converter material and situated within silicon depletion regions. One or more charge-collection electrodes are arranged to collect current generated when secondary particles enter the silicon body through walls of the pores. The pores are disposed in low-density clusters, have a majority pore thickness of 5 .mu.m or less, and have a majority aspect ratio, defined as the ratio of pore depth to pore thickness, of at least 10.
14/456,934
August 11, 2014
1/1;
H01L 31/115 (20060101); H01L 31/028 (20060101);
;257/291,429,431,443,446,458,E31.061 ;438/80,81,429,433,434
STATEMENT OF GOVERNMENT INTEREST This invention was developed under Contract DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.