Nanostructure templating using low temperature atomic layer deposition
| DWPI Title: Manufacture of nanostructure involves depositing by atomic layer deposition structural layer of material onto template, and depositing by atomic layer deposition additional structural layer of material onto template |
| Abstract: Methods are described for making nanostructures that are mechanically, chemically and thermally stable at desired elevated temperatures, from nanostructure templates having a stability temperature that is less than the desired elevated temperature. The methods comprise depositing by atomic layer deposition (ALD) structural layers that are stable at the desired elevated temperatures, onto a template employing a graded temperature deposition scheme. At least one structural layer is deposited at an initial temperature that is less than or equal to the stability temperature of the template, and subsequent depositions made at incrementally increased deposition temperatures until the desired elevated temperature stability is achieved. Nanostructure templates include three dimensional (3D) polymeric templates having features on the order of 100 nm fabricated by proximity field nanopatterning (PnP) methods. |
| Use: Method for manufacturing nanostructure. |
| Advantage: The method can provide a nanostructure that is stable at an elevated temperature from a template of the nanostructure. |
| Novelty: Manufacturing a nanostructure includes providing the template (100) of the nanostructure; depositing by atomic layer deposition structural layer(s) of a material onto the template at an initial deposition temperature; and depositing by atomic layer deposition additional structural layer(s) of the material onto the template, where the additional structural layer of the material is deposited additional deposition temperature(s). |
| Filed: 10/16/2007 |
| Application Number: US2007872749A |
| Tech ID: SD 10469.0 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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