Microelectromechanical inertial sensor
| DWPI Title: Micro electromechanical (MEM) inertial sensor for use in game controller, has pivot that is located between proof mass and bridge, to support proof mass at midpoint of bridge extending across opening formed in substrate |
| Abstract: A microelectromechanical (MEM) inertial sensor is disclosed which can be used to sense a linear acceleration, or a Coriolis acceleration due to an angular rotation rate, or both. The MEM inertial sensor has a proof mass which is supported on a bridge extending across an opening through a substrate, with the proof mass being balanced on the bridge by a pivot, or suspended from the bridge by the pivot. The proof mass can be oscillated in a tangential direction in the plane of the substrate, with any out-of-plane movement of the proof mass in response to a sensed acceleration being optically detected using transmission gratings located about an outer edge of the proof mass to generate a diffracted light pattern which changes with the out-of-plane movement of the proof mass. |
| Use: MEM inertial sensor for use in game controller, navigation apparatus, automotive field and computer joystick. |
| Advantage: The spacing between transmission grating and proof mass can be controlled independently of movement of proof mass. The tapered end of pivot is contacted with the bridge, so that contact area of pivot with the bridge is reduced, to enable the proof mass to move more freely. The proof mass can be balanced on the bridge by pivot. The MEM inertial sensor can be operated effectively in a force balance feedback mode. |
| Novelty: The sensor (10) has a bridge (18) that extends across opening (20) formed in substrate (12). A pivot (16) is located between proof mass (14) and bridge, to support proof mass at midpoint of bridge. A laser (28) generates diffracted light pattern (32) changes with movement of proof mass in response to sensed acceleration directed along substrate. The photodetector (34) detects diffracted light pattern corresponding to laser and generates electrical output signals to provide indication of sensed acceleration. |
| Filed: 3/5/2009 |
| Application Number: US2009398559A |
| Tech ID: SD 10940.0 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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