Residual gas analysis device

DWPI Title: Sampling device for holding sealed package e.g. micro electromechanical system package containing to be analyzed small gas volume, has plunger or screw device that is provided for hermetically breaching sealed gas volume of package
Abstract: A system is provided for testing the hermeticity of a package, such as a microelectromechanical systems package containing a sealed gas volume, with a sampling device that has the capability to isolate the package and breach the gas seal connected to a pulse valve that can controllably transmit small volumes down to 2 nanoliters to a gas chamber for analysis using gas chromatography/mass spectroscopy diagnostics.
Use: Sampling device for holding sealed package such as micro electromechanical system (MEMS) package containing to be analyzed small gas volume.
Advantage: The leakage of gas can be avoided, as the gas composition is essentially pure nitrogen. Since the volume of the gas in the MEMS package is only 30 nanoliters, the hermeticity in packages having very small internal volumes can be determined easily.
Novelty: The device (100) has a top section (10) having a cavity to which a package (22) is situated, and a bottom section (20) having a cavity (21) to which package is inserted. The top section is mated to the top surface of the bottom section to hermetically seal cavity. A plunger or screw device (23) is provided for hermetically breaching the sealed gas volume of package. The device is fluidically connected to a vacuum system and a pulse valve. The pulse valve is fluidically connected to a chamber which is connected to a gas analysis unit.
Filed: 3/16/2010
Application Number: US2010724476A
Tech ID: SD 7831.0
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.
Data from Derwent World Patents Index, provided by Clarivate
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