Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators
| DWPI Title: Complementary metal-oxide semiconductor integrated circuit microelectromechanical filter for e.g. code division multiple access system, has lattice networks electrically connected in parallel to filter electrical signal |
| Abstract: A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks. |
| Use: Complementary metal-oxide semiconductor (CMOS) integrated circuit microelectromechanical (MEM) filter for a communication system e.g. code division multiple access (CDMA) system, global system for mobile communications (GSM) system and worldwide interoperability for microwave access (WiMAX) system. |
| Advantage: The filter allows one of the lattice networks to be formed from the contour-mode resonator such that the series resonant frequency, the shunt resonant frequency and the center frequency for each lattice network are set independently from the other lattice networks in the filter so as to provide arbitrary percent bandwidth for the filter. The lattice network is connected at an input and an output of the filter to cancel out shunt capacitance so as to reduce insertion loss of the filter to about 6 decibel and pass band ripple to about 1.2 decibel. |
| Novelty: The filter (10) has balun lattice networks (14) formed on a substrate (12) e.g. silicon substrate, and electrically connected in parallel to filter an electrical signal received into an input of the networks and provide the filtered electrical signal to an output of the networks. Each network is provided with a contour-mode resonator e.g. ring resonator, series resonant frequency and shunt resonant frequency. The contour-mode resonator comprises piezoelectric material selected from a group consisting of aluminum nitride, lithium niobate, zinc oxide and lead-zirconate-titanate. |
| Filed: 3/2/2011 |
| Application Number: US13039029A |
| Tech ID: SD 11469.0 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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