Integrated field emission array for ion desorption
| DWPI Title: Integrated field emission array for use in microelectromechanical systems for deuterium ion desorption, has gate electrode comprising down ring of rounded or ovular cross section suspended from inner face of concentric support part |
| Abstract: An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array. |
| Use: Integrated field emission array for use in microelectromechanical systems for deuterium ion desorption. |
| Advantage: The array is fabricated with the integrated gate electrodes separated from the substrate with sufficient dielectric strength to sustain high voltages. The array ensures increased complexity of microelectromechanical systems fabrication to enable enhanced design flexibility over traditional methods. |
| Novelty: The array has a dielectric layer lying over an electrically conductive substrate comprising laterally separated cavities extending through the dielectric layer. A gate electrode structure is conformed to define tungsten annular gate electrodes (134), where each annular gate electrode is arranged concentrically above an emitter tip to provide respective gate apertures. The annular gate electrode comprises a down ring (142) of rounded or ovular cross section suspended from an inner face of a concentric support part to overhang a respective one of the laterally separated cavities. |
| Filed: 9/28/2011 |
| Application Number: US13246985A |
| Tech ID: SD 11407.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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