Microelectromechanical flow control apparatus
| DWPI Title: Microelectromechanical (MEM) flow control apparatus for microfluidic applications, has fluid channel, formed on lower layer of non-conductive material, which increases in cross-sectional size as lower layer is deformed by applied voltage |
| Abstract: A microelectromechanical (MEM) flow control apparatus is disclosed which includes a fluid channel formed on a substrate from a first layer of a nonconducting material (e.g. silicon nitride). A first electrode is provided on the first layer of the nonconducting material outside the flow channel; and a second electrode is located on a second layer of the nonconducting material above the first layer. A voltage applied between the first and second electrodes deforms the fluid channel to increase its cross-sectional size and thereby increase a flow of a fluid through the channel. In certain embodiments of the present invention, the fluid flow can be decreased or stopped by applying a voltage between the first electrode and the substrate. A peristaltic pumping of the fluid through the channel is also possible when the voltage is applied in turn between a plurality of first electrodes and the substrate. A MEM flow control assembly can also be formed by providing one or more MEM flow control devices on a common substrate together with a submicron filter. The MEM flow control assembly can optionally include a plurality of pressure sensors for monitoring fluid pressure and determining flow rates through the assembly. |
| Use: MEM flow control apparatus for microfluidic applications. Can also be used in applications wherever a small controlled rate of fluid is to be dispensed, such as delivery of saline solution containing one or more drugs e.g. for pain control, as well as in increasing, decreasing, or stopping fluid flow. Can also be used as a peristaltic pump to assist fluid flow. |
| Advantage: Fluid flow through channel can be increased by several hundred percent or more even in absence of applied voltage, by deforming upward lower layer of non-conducting material. Upper layer of non-conducting material is interposed between both lower and upper electrodes to keep both from directly contacting together, preventing short circuiting of applied voltage under normal operating conditions. The electric field resulting from the applied voltage is contained entirely within the cavity defined by both layers of non-conducting material, keeping the fluid channel and fluid free from any electric field as well as preventing possibility of electrolysis which might deleteriously affect the fluid. Keeping the fluid channel free of electric field also leads to lower electrical power consumption and prevents unwanted heating of fluid. |
| Novelty: A MEM flow control apparatus (10) has a lower layer of non-conducting material (14) disposed over the substrate (12) and forming a fluid channel (16) with an inlet port (18) and outlet port (20), lower electrodes (22) formed on the lower layer outside the fluid channel, an upper layer of non-conducting material (24) disposed above the lower layer to form a cavity (26) outside the channel, and upper electrodes (28) on the upper layer. The applied voltage between electrodes causes the lower layer to deform away from the substrate and increase the cross-sectional size of the channel. |
| Filed: 1/25/2005 |
| Application Number: US200543588A |
| Tech ID: SD 7618.0 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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